材料科学
小型化
微尺度化学
纳米技术
平版印刷术
光刻胶
制作
微加工
微图形化
光刻
聚苯乙烯
PDMS印章
微流控
立体光刻
微技术
聚合物
光电子学
复合材料
医学
数学教育
数学
替代医学
图层(电子)
病理
作者
Xin Song,Daniel Fu,Shalin Shah,John H. Reif
标识
DOI:10.1002/admt.202000146
摘要
Abstract Shrink lithography is a promising top‐down micro/nanofabrication technique capable of miniaturizing patterns/structures to scales much smaller than the initial mold, however, rapid inexpensive fabrication of high‐fidelity shrinkable microfeatures remains challenging. This work reports the discovery and characterization of a simple, fast, low‐cost method for replicating and miniaturizing intricate micropatterns/structures on commodity heat‐shrinkable polymers. Large‐area permanent micropatterning on polystyrene and polyolefin shrink film is attained in one step under ambient conditions through brief irradiation by a shortwave UV pencil lamp. After baking briefly in an oven, the film shrinks biaxially and the miniaturized micropatterns emerge with significantly reduced surface area (up to 95%) and enhanced depth profile. The entire UV‐micropatterned miniaturization process is highly reproducible and achievable on benchtop under a few minutes without chemicals or sophisticated apparatus. A variety of microgrid patterns are replicated and miniaturized with high yield and resolution on both planar and curved surfaces. Sequential UV exposures enable easy and rapid engineering of sophisticated microtopography with miniaturized, multiscale, multidimensional microstructures. UV–ozone micropatterned polystyrene surfaces are well‐suited for lab‐on‐a‐chip analytical applications owing to the inherent biocompatibility and enhanced surface hydrophilicity. Miniaturization of dense, periodic micropatterns may facilitate low‐cost prototyping of functional devices/surfaces such as micro‐optics/sensors and tunable metamaterials.
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