References

Free Access References Prof. Dr. Michael Köhler, Prof. Dr. Michael Köhler Department of Physics, Technical University of Ilmenau, Post Box 100 565, 98684 Ilmenau, GermanySearch for more papers by this authorDr. Wolfgang Fritzsche, Dr. Wolfgang Fritzsche Department for Biological Microsystems, Institute of Physical High Technology (IPHT), Post Box 100 239, 07702 Jena, GermanySearch for more papers by this author Book Author(s):Prof. Dr. Michael Köhler, Prof. Dr. Michael Köhler Department of Physics, Technical University of Ilmenau, Post Box 100 565, 98684 Ilmenau, GermanySearch for more papers by this authorDr. Wolfgang Fritzsche, Dr. Wolfgang Fritzsche Department for Biological Microsystems, Institute of Physical High Technology (IPHT), Post Box 100 239, 07702 Jena, GermanySearch for more papers by this author First published: 17 February 2004 https://doi.org/10.1002/9783527612369.refs AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat References G. Abadal, A. Boisen, Z.J. Davis, O. Hansen und F. Grey, Appl. Phys. Lett., 74 (1999) 3206. CrossrefCASWeb of Science®Google Scholar N.L. Abbott, A. Kumar, G.M. Whitesides, Chem Mater., 6 (1994) 586. CrossrefWeb of Science®Google Scholar G.C. Abeln, M.C. Hersam, D.S. Thompson, S.-T. Hwang, H. Choi, J.S. Moore und J. W. Lyding, J. Vac. Sci. Technol. B, 16 (1998) 3874. CrossrefCASWeb of Science®Google Scholar D.W. Abraham, F.A. Mcdonald, Appl. Phys. Lett., 56 (1990) 1181. CrossrefWeb of Science®Google Scholar L. Adamcikova und I. Schreiber, Chem. Papers, 44 (1990) 441. CASWeb of Science®Google Scholar H. Ahmed, J. Vac. Sci. Technol. B, 15 (1997) 2101. CrossrefCASWeb of Science®Google Scholar Y. Akiyama, F. Mizukami, Y. Kiyozumi, K. Maeda, H. Izutsu und K. Sakaguchi, Angewandte Chemie, 111 (1999) 1510. Wiley Online LibraryGoogle Scholar D.I. Amey, in: K.A. Jackson, W. Schröder (Eds), Handbook of Semiconductor Technology. Vol. 2, Processing of Semiconductors ( Wiley-VCH, Weinheim 2000) 607. Wiley Online LibraryGoogle Scholar Anderson, C.C. Bradley, J. J. McClelland und R.J. Celotta, Phys. Rev. A, 59 (1999) 2476. CrossrefCASWeb of Science®Google Scholar R.P. Andres, T. Bein, M. Dorogi, S. Feng, J.I. Henderson, C.P. Kubiak, W. Mahoney, R.G. Osifchin und R. Reifenberger, Science, 272 (1996) 1323. CrossrefCASPubMedWeb of Science®Google Scholar R.P. Andres, J.D. Bielefeld, J.I. Henderson, D.B. Janes, V.R. Kolagunta, C.P. Kubiak, W. Mahoney und R.G. Osifchin, Science, 273 (1996) 1690. CrossrefCASWeb of Science®Google Scholar M. Aono, A. Kobayashi, F. Grey, H. Uchida und D.-H. Huang, Jpn. J. Appl. Phys. Pt. 1., 32 (1993) 1470. CrossrefCASWeb of Science®Google Scholar A. Archer, J.M. Hetrick, M.H. Nayfeh und I. Adesida, J. Vac. Sci Technol. B, 12(6) (1994) 3166. CrossrefCASWeb of Science®Google Scholar P. Auger, Surf. Sci., 48 (1975) 1. CrossrefCASWeb of Science®Google Scholar CH. P. Ausschnitt, Ion-beam lithography, in: N. G. Einspruch, R.K. Watts (eds.), VLSI Microstructure Science ( AP, Orlando 1987) 320. Google Scholar M.N. Baibich, J.M. Broto, A. Fert, F. Nguyen Van Dau, F. Petroff, P. Eitenne, G. Creuzet, A. Friederich und J. Chazelas, Physical Review Letters, 61 (1988) 2472. CrossrefCASPubMedWeb of Science®Google Scholar G.G. Barna, B. V. Eck, in: Handbook of Semiconductor Manufactoring Technology ( Marcel Dekker, New York 2000), 797. Google Scholar D. Basko, G.C. La Rocca, F. Bassani und V.M. Agranovich, European Physical Journal B, 8 (1999) 353. CrossrefCASWeb of Science®Google Scholar E. Bassous, L.M. Ephrath, G. Pepper und D.J. Mikalsen, J. Electrochem. Soc., 130 (1983) 478. CrossrefCASWeb of Science®Google Scholar G. Bauer, F. Pittner und T. Schalkhammer, Mikrochimica Acta, 131 (1999) 107. CrossrefCASWeb of Science®Google Scholar S.P. Beaumont, P.G. Bower, T. Tamamura und C.D.W. Wilkinson, Appl. Phys. Lett., 38 (1981) 436 CrossrefCASWeb of Science®Google Scholar R. S. Becker, J.A. Golovchenko und B.S. Swartzentruber, Nature, 325 (1987) 419. CrossrefCASWeb of Science®Google Scholar S.C. Benjamin und N.F. Johnson, Appl. Phys. Lett., 70 (1997) 2321. CrossrefCASWeb of Science®Google Scholar M.W. Berns, W.H. Wright, Wiegand, R. Streubing, Int. Rev. Cytol., 129 (1991) 1. CrossrefCASPubMedWeb of Science®Google Scholar A.J. Berresheim, M. Müller und K. Müllen, Chem. Rev., 99 (1999) 1747. CrossrefCASPubMedWeb of Science®Google Scholar A. Bezryadin und C. Dekker, J. Vac. Sci. Technol. B, 15 (1997) 793. CrossrefCASWeb of Science®Google Scholar D. Bimberg, N. Kirstaedter, N.N. Ledentsov, Z.I. Alferov, P. S. Kop'ev und V. M. Ustinov, IEEE Journal of Selected Topics in Quantum Electronics, 3 (1997) 196. CrossrefCASWeb of Science®Google Scholar D. Bimberg, N.N. Ledentsov, M. Grundmann, N. Kirstaedter, O.G. Schmidt, M.H. Mao, V.M. Ustinov, A.Y. Egorov, A.E. Zhukov, P.S. Kopev, Z.I. Alferov, S.S. Ruvimov, U. Gösele und J. Heydenreich, Jpn. J. Appl. Phys. Pt. 1., 35 (1996) 1311. CrossrefCASWeb of Science®Google Scholar G. Binnig, M. Despont, U. Drechsler, W. Häberle, M. Lutwyche, P. Vettiger, H.J. Mamin, B.W. Chui und T.W. Kenny, Appl. Phys. Lett., 74 (1999) 1329. CrossrefCASWeb of Science®Google Scholar T. Bjornholm, T. Hassenkam, D.R. Greve, R.D. Mccullough, M. Jayaraman, S.M. Savoy, C.E. Jones und J.T. Mcdevitt, Advanced Materials, 11 (1999), 1218. Wiley Online LibraryCASWeb of Science®Google Scholar P. Bley, Interdisciplinary Science Reviews, 18 (1993) 267. CrossrefWeb of Science®Google Scholar P. Bley, J. Göttert, M. Harmening, M. Himmelhaus, W. Menz, J. Mohr, C. Müller und U. Wallrabe, Proc. MICRO SYSTEM Technologies, 91 (1991) 302. Google Scholar K. Blüthner, M. Götz, A. Hädicke, W. Krech, TH. Wagner, H. Mühlig, H.-J. Fuchs, U. Hübner, D. Schnelle und E.-B. Kley, IEEE Transact. Appl. Superconductivity, 7 (1997) 3099. CrossrefWeb of Science®Google Scholar M. Bockrath, D.H. Cobden, P.L. Mceuen, N. G. Chopra, A. Zettl, A. Thess und R. E. Smalley, Science, 275 (1997) 1922. CrossrefCASPubMedWeb of Science®Google Scholar A.F. Bogenschütz, Ätzpraxis für Halbleiter ( München 1967). Google Scholar A. Boisen, K. Birkenund, O. Hansen und F. Grey, J. Vac. Sci. Technol. B, 16 (1998) 2977. CrossrefCASWeb of Science®Google Scholar V. Bögli, Dissertation, Aachen (1988) 18. Google Scholar M.J. Bowden, in: L.F. Thompson, C.G. Willson, M.J. Bowden (eds.), Introduction to Microlithography ( ACS, 2nd., Washington 1994) 19. Google Scholar B. Brezger, T. Schulze, U. Drodofsky, J. Stuhler, S. Nowak, T. Pfau und J. Mlynek, J. Vac. Sci. Technol. B, 15 (1997) 2905. CrossrefCASWeb of Science®Google Scholar R.C. Bracken et al., in: Handbook of Semiconductor Manufactoring Technology ( Marcel Dekker, New York 2000) 999. Google Scholar E. Braun, Y. Eichen, U. Sivan und B.-Y. Gdalyahu, Nature, 391 (1998) 775. CrossrefCASPubMedWeb of Science®Google Scholar A.N. Broers, J. Electrochem. Soc., 128 (1981) 166. CrossrefCASWeb of Science®Google Scholar D. Brune, R. Hellborg, H.J. Whitlow und O. Hunderi (eds.), Surface Characterization ( Wiley-VCH, Weinheim 1997). Wiley Online LibraryGoogle Scholar H. Brückl, A. Hütten, G. Reiss, A. Becker und A. Pühler, Statusseminar Magnetoelektronik (2000). Google Scholar H. Brückl, J. Kretz, H.W. Koops und G. Reiss, J. Vac. Sci. Technol. B, 17 (1999) 1350. CrossrefCASWeb of Science®Google Scholar M. Burghard, G. Philipp, S. Roth und K. Von Klitzing, Applied Physics A, 67 (1998) 591. CrossrefCASWeb of Science®Google Scholar M. Burkhardt, H.I. Smith, D.A. Antoniadis, T.P. Orlando, M.R. Melloch, K.W. Rhee und M.C. Peckerar, J. Vac. Sci Technol. B, 12(6) (1994) 3611. CrossrefCASWeb of Science®Google Scholar M.A. Burns, C.H. Mastrangelo, T.S. Sammarco, F.P. Man, J.R. Webster, B.N. Johnson, B. Foerster, D. Jones, Y. Fields und A.R. Kaiser, Proc. Natl. Acad. Sci., 93 (1996) 5556. CrossrefCASPubMedWeb of Science®Google Scholar J.H. Burroughes, D.D.C. Bradley, A.R. Brown, R.N. Marks, K. Mackay, R.H. Friend, P.L. Burns und A.B. Holmes, Nature, 347 (1990) 539. CrossrefCASWeb of Science®Google Scholar D.W. Carr, L. Sekaric und H.G. Craighead, J. Vac. Sci. Technol. B, 16 (1998) 3821. CrossrefCASWeb of Science®Google Scholar A.M. Cassell, C.L. Asplund und J.M. Tour, Angewandte Chemie, 111 (1999) 2565. Wiley Online LibraryGoogle Scholar A.M. Cassell, N.R. Franklin, T.W. Tombler, E.M. Chan, J. Han und H. Dai, J. Am. Chem. Soc., 121 (1999) 7975. CrossrefCASWeb of Science®Google Scholar R. Catanescu, J. Binder und J. Zacheja, Proc. "MICRO SYSTEM Technologies 96" (1996) 717. Google Scholar G. Che, S.A. Miller, E.R. Fisher und C.R. Martin, Analytical Chemistry, 71 (1999) 3187. CrossrefCASPubMedWeb of Science®Google Scholar A.C. Chen, A.L. Flamholz, R. Rippstein, R.H. Fair, D.A. Heald und R.J. Amodeo, J. Vac. Sci. Technol. B, 15 (1997) 2476. CrossrefCASWeb of Science®Google Scholar W. Chen und H. Ahmed, J. Vac. Sci. Technol. B, 11 (1993) 2519. CrossrefCASWeb of Science®Google Scholar H.J. Choi, T.S. Lee und M.P. Suh, Angewandte Chemie, 111 (1999) 1490. Wiley Online LibraryGoogle Scholar W.B. Choi, D.S. Chung, J.H. Kang, H.Y. Kim, Y.W. Jin, I.T. Han, Y.H. Lee, J.E. Jung, N.S. Lee, G.S. Park und J.M. Kim, Appl. Phys. Lett., 75 (1999) 3129. CrossrefCASWeb of Science®Google Scholar S.Y. Chou, P.R. Krauss und L. Kong, J. Appl. Phys., 79 (1996) 6101. CrossrefCASWeb of Science®Google Scholar S.Y. Chou, P.R. Krauss und P.J. Renstrom, Appl. Phys. Lett., 67 (1995) 3114. CrossrefCASWeb of Science®Google Scholar S.Y. Chou, P.R. Krauss und P.J. Renstrom, Science 272 (1996) 85. Google Scholar S.Y. Chou, P.R. Krauss, W. Zhang, L. Guo und L. Zhuang, J. Vac. Sci. Technol. B, 15 (1997) 2897. CrossrefCASWeb of Science®Google Scholar J. Collet und D. Vuillaume, Appl. Phys. Lett., 73 (1998) 2681. CrossrefCASWeb of Science®Google Scholar H.G. Craighead, J. Appl. Phys., 55 (1984) 4430. CrossrefCASWeb of Science®Google Scholar H.G. Craighead, R.E. Howard, L. D. Jackel und P.M. Mankiewich, Appl. Phys. Lett., 42 (1983) 38. CrossrefCASWeb of Science®Google Scholar B.C. Crandell, J. Lewis (eds.), Nanotechnology ( MIT press Cambridge 1989). Google Scholar M.F. Crommie, C.P. Lutz und D. M. Eigler, Science, 262 (1993) 218. CrossrefCASPubMedWeb of Science®Google Scholar M. Cross, Travel to the Nanoworld ( Plenum Trade New York 1999). Google Scholar J.A. Dagata, J. Schneier, H.H. Habary, C.J. Evans, M.T. Postek und J. Bennett, Appl. Phys. Lett., 56 (1990) 2001. CrossrefCASWeb of Science®Google Scholar J.H. Daniel, S. Iqbal, R.B. Millington, D.F. Moore, C.R. Lowe, D. Leslie, M.A. Lee und M.J. Pearce, Sensors und Actuators A, 71 (1998) 81. CrossrefCASWeb of Science®Google Scholar J. Dapprich und N. Nicklaus, Manuskript (1998). Google Scholar W.A. De Heer, A. Chatelain und D. Ugarte, Science, 270 (1995) 1179. CrossrefCASPubMedWeb of Science®Google Scholar J.R. Dennis, J. Howard und V. Vogel, Nanotechnology, 10 (1999) 232. CrossrefCASWeb of Science®Google Scholar P.J. De Pablo, F. Moreno-Herrero, J. Colchero, J. Gómez Herrero, P. Herrero, A.M. Baró, P. Ordejón J.M. Soler und E. Artacho, Physical Review Letters, 85 (2000) 4992. CrossrefCASPubMedWeb of Science®Google Scholar M.M. Deshmukh, A.C. Ralph, M. Thomas und J. Silcox, Appl. Phys. Lett., 75 (1999) 1631. CrossrefCASWeb of Science®Google Scholar M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer und P. Vettiger, Sensors und Actuators A, 80 (2000) 100. CrossrefCASWeb of Science®Google Scholar O. Dial, C.C. Cheng und A. Scherer, J. Vac. Sci. Technol. B, 16 (1998) 3887. CrossrefCASWeb of Science®Google Scholar A.C. Diebold, in: Handbook of Semiconductor Manufactoring Technology ( Marcel Dekker, New York 2000) 745. Google Scholar N.J. Dinardo, Nanoscale Characterization of Surfaces und Interfaces ( VCH Weinheim 1994). Wiley Online LibraryGoogle Scholar B. Dieny, V.S. Speriosu, S. Metin, S.S.P. Parkin, B.A. Gurney, P. Baumgart und D.R. Wilhoit, J. Appl. Phys., 69 (1991) 4774. CrossrefCASWeb of Science®Google Scholar A. Dove, Nature Biotechnology, 156 (1998) 830. CrossrefWeb of Science®Google Scholar K.E. Drexler, Nanosystems ( John Wiley & Sons New York 1992). Google Scholar D. Drouin, J. Beauvais, E. Lavallée, S. Michel, J. Mouine und R. Gauvin, J. Vac. Sci. Technol. B, 15 (1997) 2269. CrossrefCASWeb of Science®Google Scholar H.J. Dudek, in: Angewandte Oberflächenanalyse mit SIMS, AES und XPS ( Berlin 1986) 97. Google Scholar T.M. Duncan, V.V. Bulygin, Y. Zhou, M.L. Hutcheon und R.L. Cross, Proc. Natl. Acad. Sci. USA, 92 (1995) 10 964. CrossrefCASWeb of Science®Google Scholar T.W. Ebbesen und P.M. Ajayan, Nature, 358 (1992) 220. CrossrefCASWeb of Science®Google Scholar T.W. Ebbesen, H.J. Lezec, H. Hiura, J. W. Bennett, H. F. Ghaemi und T. Thio, Nature 382 (1996) 54. CrossrefCASWeb of Science®Google Scholar M.F. Ebel, in: Angewandte Oberflächenanalyse mit SIMS, AES und XPS ( Berlin 1986) 221. Google Scholar F.T. Edelmann, Angewandte Chemie, 111 (1999) 1473. Wiley Online LibraryGoogle Scholar R.L. Edelstein, Tamanaha, P.E. Sheehan, M.M. Miller, D.R. Baselt, L.J. Whitman und R.J. Colton, Biosensors und Bioelectronics, 14 (2000) 805. CrossrefCASPubMedWeb of Science®Google Scholar E.E. Ehrichs, R.M. Silver und A.L. De Lozanne, J. Vac. Sci. Technol. A, 6 (1988) 540. CrossrefCASWeb of Science®Google Scholar D.M. Eigler und E.K. Schweizer, Nature, 344 (1990) 524. CrossrefCASWeb of Science®Google Scholar J.C. Ellenbogen und J.C. Love, Proceedings of the IEEE, 88 (2000) 386. CrossrefCASWeb of Science®Google Scholar D. Fenske und H. Krautscheid, Angewandte Chemie, 102 (1990) 1513. Wiley Online LibraryCASGoogle Scholar D.K. Ferry, M. Khoury, D.P. Pivin, K.M. Connolly, T.K. Whidden, M.N. Kosicki und D.R. Allee, semicond. Sci. Technol., 11 (1996) 1552. CrossrefCASWeb of Science®Google Scholar M. Fischer und F. Vögtle, Angewandte Chemie, 111 (1999) 934. Wiley Online LibraryGoogle Scholar D. Fitzmaurice, S.N. Rao, J.A. Preece, J.F. Stoddart, S. Wenger und N. Zaccheroni, Angew. Chem., 111 (1999) 1220. Wiley Online LibraryGoogle Scholar S.P.A. Fodor, Science, 277 (1997) 393. CrossrefCASWeb of Science®Google Scholar S.P.A. Fodor und J.W. Jacobs, Tibtech, 12 (1994) 19. CrossrefWeb of Science®Google Scholar S.P.A. Fodor, J.L. Read, M.C. Pirrung, L. Stryer, Amy Tsai Lu und D. Solas, Science, 251 (1991) 767. CrossrefCASPubMedWeb of Science®Google Scholar E.M. Ford und H. Ahmed, J. Vac. Sci. Technol. B, 16(6) (1998) 3800. CrossrefCASWeb of Science®Google Scholar J.S. Foster, J.E. Frommer und P.C. Arnett, Nature, 331 (1988) 324. CrossrefCASPubMedWeb of Science®Google Scholar R.H. Friend, R.W. Gymer, A.B. Holmes, J.H. Burroughes, R.N. Marks, C. Taliani, D.D.C. Bradley, D.A. Dos Santos, J.L. Brédas, M. Lögdlund und W. R. Salaneck, Nature, 397 (1999) 121– 127. CrossrefCASWeb of Science®Google Scholar J. Fritz, M.K. Baller, H.P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Güntherodt, C. Gerber und J.K. Gimzewski, Science, 288 (2000) 316. CrossrefCASPubMedWeb of Science®Google Scholar W. Fritzsche, H. Porwol, A. Wiegand, S. Bornmann, J.M. Köhler, Nanostructured Materials, 10 (1998a) 89. CrossrefCASWeb of Science®Google Scholar W. Fritzsche, K.J. Böhm, E. Unger und J.M. Köhler, Nanotechnology, 9 (1998b) 177. CrossrefCASWeb of Science®Google Scholar W. Fritzsche, A. Csá Ki, R. Möller, R. Bickel, S. Senz, J. Langer und J.M. Köhler, Recent Res. Devel. Vacuum Sci. & Tech., 1 (1999) 81. CASGoogle Scholar W. Fritzsche, K.J. Böhm, E. Unger und J.M. Köhler, Appl. Phys. Lett., 75 (1999a) 2854. CrossrefCASGoogle Scholar W. Fritzsche, J.M. Köhler, K.J. Böhm, E. Unger, T. Wagner, R. Kirsch, M. Mertig und W. Pompe, Nanotechnology, 10 (1999b) 331. CrossrefWeb of Science®Google Scholar J. Fujita, Y. Ohnishi, Y. Ochiai, E. Nomura und S. Matsui, J. Vac. Sci. Technol. B, 14 (1996a) 4272. CrossrefCASWeb of Science®Google Scholar J. Fujita, Y. Ohnishi, Y. Ochiai, S. Matsui, Appl. Phys. Lett., 68 (1996b) 1297. CrossrefCASWeb of Science®Google Scholar A. Fujiwara, Y. Takahashi, K. Murase und M. Tabe, Appl. Phys. Lett., 67 (1995) 2957. CrossrefCASWeb of Science®Google Scholar A. Fujiwara, Y. Takahashi, K. Yamazaki, H. Namamtsu, M. Nagase, K. Kurihara und K. Murase, IEEE Transactions on Electron Devices, 46 (1999) 954. CrossrefWeb of Science®Google Scholar G.E. Fuller, in: Handbook of Semiconductor Manufactoring Technology ( Marcel Dekker, New York 2000) 461. Google Scholar T.A. Fulton und G. J. Dolan, Physical Review Letters, 59 (1987) 109. CrossrefCASPubMedWeb of Science®Google Scholar M.A. Gallop, R.W. Barrett, W.J. Dower, S.P. A. Fodor und E.M. Gordon, J. Med. Chem., 37 (1994) 1233. CrossrefCASPubMedWeb of Science®Google Scholar L.J. Geerligs, V.F. Anderegg, P.A.M. Holweg, J.E. Mooij, H. Pothier, D. Esteve, C. Urbina und M.H. Devoret, Physical Review Letters, 64 (1990) 2691. CrossrefCASPubMedWeb of Science®Google Scholar F. Geiger, M. Stoldt, H. Schweizer, P. Bäuerle und E. Umbach, Advanced Materials, 5 (1993) 922. Wiley Online LibraryCASWeb of Science®Google Scholar B. Geisler, F. Noll und N. Hampp, Scanning, 22 (2000) 7. Wiley Online LibraryCASPubMedWeb of Science®Google Scholar W. Geyer, V. Stadler, W. Eck, M. Zharnikov, A. Gölzhäuser und M. Grunze, Appl. Phys. Lett., 75 (1999) 2401. CrossrefCASWeb of Science®Google Scholar J. Gierak, C. Vieu, H. Launois, G. B. Asaayag und A. Septier, Appl. Phys. Lett., 70 (1997) 2049. CrossrefCASWeb of Science®Google Scholar S.L. Gilat, A. Adronov und J.M.J. Fréchet, Angewandte Chemie, 111 (1999) 1519. Wiley Online LibraryGoogle Scholar E.I. Givargizov, A.N. Stepanova, L.N. Obolenskaya, E.S. Mashkova, V.A. Molchanov, M.E. Givargizov und I.W. Rangelow, Ultramicroscopy, 82 (2000) 57. CrossrefCASPubMedWeb of Science®Google Scholar R. Glöss und P. Pertsch, F&M, 107 (1999) 64. Google Scholar H. Gokan, M. Itoh und S. Esho, Vacuum Science und Technology, B2 (1984) 34. CrossrefWeb of Science®Google Scholar E.M. Gordon, R.W. Barrett, W.J. Dower, S.P.A. Fodor und M.A. Gallop, J. Med. Chem., 37 (1994) 1385. CrossrefCASPubMedWeb of Science®Google Scholar W. Göpel, Sensors und "smart" molecular nanostructures: components for future Information Technologies; in Sensors, vol 8. Micro- und Nanosensor Technology ( VCH Weinheim 1995) 295– 336. Google Scholar M. Götz et al., J. Appl. Phys., 78 (1995) 5499. CrossrefWeb of Science®Google Scholar M. Granström, M. Berggren und O. Inganäs, Science, 267 (1995) 1479. CrossrefCASPubMedWeb of Science®Google Scholar M. Grasserbauer, in: Angewandte Oberflächenanalyse mit SIMS, AES und XPS ( Berlin 1986) 1. Google Scholar N.C. Greenham, S.C. Moratti, D.D.C. Bradley, R.H. Friend und A.B. Holmes, Nature, 365 (1993) 628– 630. CrossrefCASWeb of Science®Google Scholar G. Gross, R. Kaesmaier, H. Löschner und G. Stengl, J. Vac. Sci. Technol. B, 16 (1998) 3150. CrossrefCASWeb of Science®Google Scholar A. Gruber, J. Gspann und H. Hoffmann, Aplied Physics A, 68 (1999) 197. CrossrefCASWeb of Science®Google Scholar U.-W. Grummt, M. Geissler, T. Drechsler, H. Fuchs und R. Staub, Angewandte Chemie 110 (1998) 3480. Wiley Online LibraryGoogle Scholar C. Gui, G.J. Veldhuis, T.M. Koster, P.V. Lambeck, J.W. Berenschot, J.G.E. Gardeniers und M. Elwenspoek, Microsystem Technologies, 5 (1999) 138. CrossrefWeb of Science®Google Scholar L. Guo, E. Leobandung und S. Y. Chou, Science 275 (1997) 649. CrossrefCASPubMedWeb of Science®Google Scholar L. Guo, E. Leobandung, L. Zhuang und S. Y. Chou, J. Vac. Sci. Technol. B, 15 (1997) 2840. CrossrefCASWeb of Science®Google Scholar C.W. Gwyn, R. Stulen, D. Sweeney und D. Attwood, J. Vac. Sci. Technol. B, 16 (1998) 3142. CrossrefCASWeb of Science®Google Scholar H.-F. Hadamovsky (eds.), Halbleiterwerkstoffe ( Leipzig 1972). Google Scholar A.M. Haghiri-Gosnet, C. Vieu, G. Simon, F. Carcenac, A. Madouri, Y. Chen, F. Rousseaux und H. Launois, J. Vac. Sci. Technol. B, 13 (1995) 3066. CrossrefCASWeb of Science®Google Scholar J. Haisma, M. Verheijen, K. Van Den Heuvel und J. Van Den Berg, J. Vac. Sci. Technol. B, 14 (1996) 4124. CrossrefCASWeb of Science®Google Scholar J.J.M. Halls, C.A. Walsh, N.C. Greenham, E.A. Marseglia, R.H. Friend, S.C. Moratti und A.B. Holmes, Nature 376 (1995) 498– 500. CrossrefCASWeb of Science®Google Scholar C. Hamon, T. Brandstetter und N. Windhab, Synlett, S1 (1999) 940. CrossrefGoogle Scholar J. Hartwich, M. Sundermann, U. Kleineberg und U. Heinzmann, Applied Surface Science, 144–145 (1999) 538. CrossrefWeb of Science®Google Scholar L. He, M.D. Musick, S.R. Nicewarner, F.G. Salinas, S.J. Benkovic, M.J. Natan und C.D. Keating, J. Am. Chem. Soc., 122 (2000) 9071. CrossrefCASWeb of Science®Google Scholar A. Heuberger (Hrsg.), Mikromechanik ( Springer, Berlin 1991). Google Scholar S.B. Hill, C.A. Haich, F.B. Dunning, G.K. Walters, J.J. McClelland, R.J. Celotta, H.G. Craighead, J. Han und D.M. Tanenbaum, J. Vac. Sci. Technol. B, 17 (1999) 1087. CrossrefCASWeb of Science®Google Scholar F.J. Himpsel, T. Jung, A. Kirakosian, J.-L. Lin, D.Y. Petrovykh, H. Rauscher und J. Viernow, MRS Bulletin, August (1999) 20. CrossrefCASWeb of Science®Google Scholar H. Hirayama, K. Matsunaga, M. Asada, Y. Suematusa, Electron. Lett., 30 (1994) 142– 143, 14. CrossrefCASWeb of Science®Google Scholar N. Hirose, H. Ohta und T. Matsui, IEEE Transactions on Applied Superconductivity, 7 (1997) 2635. CrossrefWeb of Science®Google Scholar P.K.H. Ho, J.S. Kim, J.H. Burroughes, H. Becker, S.F.Y. Li, T.M. Brown, F. Cacialli und R.H. Friend, Nature, 404 (2000) 481– 484. CrossrefCASPubMedWeb of Science®Google Scholar P.C.D. Hobbs, D.W. Abraham, H.K. Wickramasinghe, Appl. Phys. Lett., 55 (1989) 2357. CrossrefWeb of Science®Google Scholar S. Hong, J. Zhu und C.A. Mirkin, Science, 286 (1999) 523. CrossrefCASPubMedWeb of Science®Google Scholar J. Howard, A.J. Hunt und S. Baek, Methods in Cell Biology, 39 (1993) 137. CrossrefCASPubMedWeb of Science®Google Scholar Y. Hsu, T.E.F.M. Standaert, G.S. Oehrlein, T.S. Kuan, SAYRE, K. Rose, K.Y. Lee und S. M. Rossnagel, J. Vac. Sci. Technol. B, 16 (1998) 3344. CrossrefCASWeb of Science®Google Scholar X. Hu, D. Sarid und P. Von Blanckenhagen, kNanotechnology, 10 (1999) 209. CrossrefCASWeb of Science®Google Scholar X. Hu und P. Von Blanckenhagen, Appllied Physics A, 68 (1999) 137. CrossrefCASWeb of Science®Google Scholar X. Hu, und P. Von Blankenhagen, J. Vac. Sci. Technol. B, 17 (1999) 265. CrossrefWeb of Science®Google Scholar B.-H. Huisman, H. Schönherr, W.T.S. Huck, A. Friggeri, H.-J. Van manen, E. Menozzi, G.J. Vansco, F.C.J.M. Van Veggel und D.N. Reinhoudt, Angewandte Chemie, 111 (1999) 2385. Wiley Online LibraryGoogle Scholar T.L. Hylton, Appl. Phys. Lett., 62 (1993) 2431. CrossrefCASWeb of Science®Google Scholar T. Ichinokawa, H. Itzumi, C. Haginoya und H. Itoh, Nanotechnology 3 (1992) 147. CrossrefGoogle Scholar S. Iijima, Nature, 354 (1991) 56. CrossrefCASWeb of Science®Google Scholar N. Ikawa, S. Shimada und H. Tanaka, Nanotechnology, 3 (1992) 6. CrossrefGoogle Scholar O. Ikkala, J. Ruokolainen, R. Mäkinen, M. Torkkeli, R. Serimaa, T. Mäkelä und G. Ten Brinke, Synthetic Metals, 102 (1999) 1498. CrossrefCASWeb of Science®Google Scholar T. Ishii, H. Nozawa, T. Tamamura und A. Ozawa, J. Vac. Sci. Technol. B, 15 (1997) 2570. CrossrefCASWeb of Science®Google Scholar T. Ishii, H. Tanaka, E. Kuramochi und T. Tamamura, Jpn. J. Appl. Phys. Pt. 1., 37 (1998) 7202. CrossrefCASWeb of Science®Google Scholar H. Ishikuro, T. Fujii, T. Saraya, G. Hashiguchi, T. Hiramoto und T. Ikoma, Appl. Phys. Lett. 68 (1996) 3585. CrossrefCASWeb of Science®Google Scholar R.J. Jackmann, J. L. Wilburg, G. M. Whiteside, Science, 269 (1995) 664. CrossrefCASPubMedWeb of Science®Google Scholar K.A. Jackson, W. Schröder (eds.), Handbook of Semiconductor Technology. Vol. 2, Processing of Semiconductors ( Wiley-VCH, Weinheim 2000). Google Scholar L. Jiang, Y. Kim, T. Iyoda, J. Li, K. Kitazawa, A. Fujishima und K. Hashimoto, Advanced Materials, 11 (1999) 649. Wiley Online LibraryCASWeb of Science®Google Scholar C. Joachim und J.K. Gimzewski, Chemical Physics Letters, 265 (1997) 353. Ref. ID: 2095. CrossrefCASWeb of Science®Google Scholar P.M.S. John und H.G. Craighead, J. Vac. Sci. Technol. B, 14 (1996) 69. CrossrefWeb of Science®Google Scholar K.A. Jolliffe, P. Timmerman und D.N. Reinhoudt, Angewandte Chemie, 111 (1999) 983. Wiley Online LibraryGoogle Scholar G.A.C. Jones, P.D. Rose und S. Brown, J. Vac. Sci. Technol. B, 16 (1998) 2570. CrossrefCASWeb of Science®Google Scholar W. Junge, H. Lill und S. Engelbrecht, Trends. Biochem. Sci., 22 (1997) 420. CrossrefCASPubMedWeb of Science®Google Scholar F.W. Kern, G.W. Gale, in: Handbook of Semiconductor Manufactoring Technology ( Marcel Dekker, New York 2000). Google Scholar E. Kim, Y. Xia, X.-M. Zhao und G.M. Whitesides, Advanced Materials, 9 (1997) 651. Wiley Online LibraryCASWeb of Science®Google Scholar P. Kim und C.M. Lieber, Science, 286 (1999) 2148. CrossrefCASPubMedWeb of Science®Google Scholar N. Kirstaedter, N.N. Ledentsov, M. Grundmann, D. Bimberg, V.M. Ustinov, S.S. Ruvimov, M.V. Maximov, P.S. Kop'ev, ZH.I. Alferov, Electron. Lett., 30 (1994) 1416– 1417. CrossrefCASWeb of Science®Google Scholar B. Klehn und U. Kunze, Journal of Applied Physics, 85 (1999) 3897. CrossrefCASWeb of Science®Google Scholar D.L. Klein, P. L. Mceuen, J.E. Bowen Katari, R. Roth und A.P. Alivisatos, Appl. Phys. Lett. 68 (1996) 2574. CrossrefCASWeb of Science®Google Scholar H.-A. Klok, K.A. Jolliffe, C.L. Schauer, I. J. Prins, J. P. Spatz, M. Möller, P. Timmerman und D.N. Reinhoudt, J. Am. Chem. Soc., 121 (1999) 7154. CrossrefCASWeb of Science®Google Scholar T. Koester, F. Goldschmidtboeing, B. Hadam, J. Stein, S. Altmeyer, B. Spangenberg und H. Kurz, J. Vac. Sci. Technol. B, 16(6) (1998) 3804. CrossrefCASWeb of Science®Google Scholar J.M. Köhler, O. Ritzel, W. Brodkorb, P. Dittrich, Exp. Techn. d. Physik, 39 (1991) 277. Google Scholar J.M. Köhler, R. Pechmann, A. Schaper, A. Schober, T.M. Jovin, M.