A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator

This paper describes the first 32 kHz low-power MEMS-based oscillator in production. The primary goal is to provide a small form-factor oscillator (1.5 × 0.8 mm 2 ) for use as a crystal replacement in space-constrained mobile devices. The oscillator generates an output frequency of 32.768 kHz and its binary divisors down to 1 Hz. The frequency stability over the industrial temperature range (-40 °C to 85 °C) is ±100 ppm as an oscillator (XO) or ±3 ppm with optional calibration as a temperature compensated oscillator (TCXO). Supply currents are 0.9 μA for the XO and 1.0 μA for the TCXO at supply voltages from 1.4 V to 4.5 V. The MEMS resonator is a capacitively-transduced tuning fork at 524 kHz. The circuitry is fabricated in 180 nm CMOS and includes low power sustaining circuit, fractional-N PLL, temperature sensor, digital control, and low swing driver.