碳纳米管
纳米技术
薄脆饼
化学气相沉积
化学
热重分析
纳米管
拉曼光谱
热氧化
蚀刻(微加工)
无定形固体
反应离子刻蚀
化学工程
硅
材料科学
有机化学
图层(电子)
物理
工程类
光学
作者
Miao Wang,Taotao Li,Yagang Yao,Huifen Lu,Qiang Li,Minghai Chen,Qingwen Li
摘要
The first critical step in making vertically aligned carbon nanotube (VACNT)-based thermal interface materials is to transfer the VACNTs on a large scale. Although VACNTs have been transferred by several methods, they were only transferred inadvertently in most cases. Here we report well-controlled weak-oxidation-assisted transfer of VACNTs. Specifically, after a short time of weak oxidation, we found that VACNTs could be easily detached from the native growth substrates, and thus, a freestanding VACNT film was obtained. Then the VACNTs could be assembled onto specific substrates for its real applications. More importantly, the repeated growth-transfer synthesis of VACNT arrays can be realized in one batch by introducing an additional process of weak oxidation in chemical vapor deposition, which makes the strategy more effective. Surprisingly, no degradation in the quality was observed before and after the weak oxidation according to thermogravimetric analysis and Raman spectra of VACNTs. Enhanced thermal and mechanical properties were achieved after reactive ion etching (RIE) and subsequent metallization of the surfaces of the VACNTs, and this might be due to the removal of impurities such as amorphous carbon and entangled CNTs by RIE. These findings provide an efficient approach for transferring VACNTs, which is important for the application of VACNTs in thermal management.
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