AlN MEMS Resonator with High Quality Factor

This paper reports a novel design on the notched supports coupled to the end of tethers to enhance the quality factor (Q factor) of the Lamb wave Aluminum Nitride (AlN) micro-electro-mechanical systems (MEMS) resonators. The anchor loss was reduced with the optimal notched support. Compared with the conventional flat-edge resonators, the Q factors of the fabricated resonators were improved by 1.42 times and 1.20 times at frequencies of 664 MHz and 839 MHz, respectively. This proposed approach can be adapted to various piezoelectric resonators which suffered from severe anchor loss induced by conventional tether designs.