Update of >300W high power LPP-EUV source challenge III for semiconductor HVM

极紫外光刻 激光器 材料科学 光学 功率(物理) 光电子学 占空比 激光功率缩放 电气工程 物理 工程类 量子力学
作者
Hakaru Mizoguchi,Hiroaki Nakarai,Tamotsu Abe,Hiroshi Tanak,Yukio Watanabe,Tsukasa Hori,Yutaka Shiraishi,Tatsuya Yanagida,George Sumangne,Tsuyoshi Yamada,Takashi Saitou
标识
DOI:10.1117/12.2581910
摘要

Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength laser pulses for shooting and debris mitigation by magnetic field have been applied. We have developed first practical source for HVM; "GL200E" 1) in 2014. Then it is demonstrated which high average power CO2 laser more than 20kW at output power in cooperation with Mitsubishi Electric2). Pilot#1 is up running and it demonstrates HVM capability; EUV power recorded at 111W on average (117W in burst stabilized, 95% duty) with 5% conversion efficiency for 22 hour operation in October 20163). Availability is achievable at 89% (2 weeks average), also superior magnetic mitigation has demonstrated promising mirror degradation rate (= 0.5%/Gp) at 100W or higher power operation with dummy mirror test. We have demonstrated >300W operation data (short-term) and actual collector mirror reflectivity degradation rate is less than 0.15%/Gp by using real collector mirror around 125W (at I/F clean) in burst power > 10 Billion pulses operation4). Also we will update latest challenges for >250W average long-term operation with collector mirror at the conference. REFERENCE 1) Hakaru Mizoguchi, et. al.: "Sub-hundred Watt operation demonstration of HVM LPP-EUV source", Proc. SPIE 9048, (2014) 2) Yoichi Tanino et.al.:" A Driver CO2 Laser Using Transverse-flow CO2 Laser Amplifiers", EUV Symposium 2013, ( Oct.6-10.2013, Toyama) 3) Hakaru Mizoguchi, et al: " High Power HVM LPP-EUV Source with Long Collector Mirror Lifetime", EUVL Workshop 2017, (Berkley, 12-15, June, 2017) 4) Hakaru Mizoguchi et al.:" Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM", Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI (2019) [11323-28]
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
1秒前
1秒前
1秒前
治治治完成签到,获得积分10
3秒前
YanDongXu发布了新的文献求助10
5秒前
123发布了新的文献求助10
5秒前
TianlangPan完成签到,获得积分10
5秒前
njhuxs完成签到,获得积分10
6秒前
芬达完成签到 ,获得积分10
8秒前
yangminghan发布了新的文献求助10
8秒前
蜂蜜小熊完成签到 ,获得积分10
10秒前
11秒前
11秒前
11秒前
清脆的巧凡应助Dawn采纳,获得20
12秒前
12秒前
田様应助今夜不设防采纳,获得10
12秒前
华仔应助Nikko采纳,获得10
12秒前
我是老大应助Brain采纳,获得10
14秒前
星辰大海应助KKKpumc采纳,获得10
14秒前
至乐无乐完成签到 ,获得积分10
15秒前
xinglonglin完成签到,获得积分10
15秒前
Yep0672发布了新的文献求助10
16秒前
16秒前
Vera完成签到,获得积分10
17秒前
酷波er应助龙仔采纳,获得10
17秒前
17秒前
共享精神应助123采纳,获得10
17秒前
18秒前
18秒前
夜倾心完成签到,获得积分10
18秒前
Lychee完成签到 ,获得积分10
19秒前
杜本内完成签到,获得积分10
19秒前
20秒前
20秒前
yangminghan完成签到,获得积分10
21秒前
jiakai完成签到,获得积分10
23秒前
capitalist发布了新的文献求助10
23秒前
争取不秃顶的医学僧完成签到,获得积分10
23秒前
23秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Effective Learning and Mental Wellbeing 400
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3975953
求助须知:如何正确求助?哪些是违规求助? 3520269
关于积分的说明 11201866
捐赠科研通 3256738
什么是DOI,文献DOI怎么找? 1798436
邀请新用户注册赠送积分活动 877578
科研通“疑难数据库(出版商)”最低求助积分说明 806464