Fluorine Compounds, Inorganic, Nitrogen

Abstract Nitrogen has four binary fluorides: nitrogen trifluoride, tetrafluorohydrazine, difluorodiazine, and fluorine azide. There are numerous other nitrogen fluorine compounds, the most significant of which are the perfluoroammonium salts based on the NF + 4 cation. Of all the nitrogen fluorine compounds, only NF 3 has been of commercial importance. Nitrogen trifluoride is used as an etchant gas in the electronic industry and as a fluorine source in high power chemical lasers.