A Flexible Pressure Sensor with Wide Detection Range Based on Capacitive‐Piezoresistive Dual Mode Conversion for Human‐Machine Interaction

Advanced Materials TechnologiesVolume 9, Issue 4 2301377 Research Article A Flexible Pressure Sensor with Wide Detection Range Based on Capacitive-Piezoresistive Dual Mode Conversion for Human-Machine Interaction Liangsong Huang, Liangsong Huang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorShuo Wang, Shuo Wang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorPeng Zhang, Corresponding Author Peng Zhang [email protected] orcid.org/0009-0005-0158-9245 The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 China E-mail: [email protected]Search for more papers by this authorKun Zhang, Kun Zhang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorYuxia Li, Yuxia Li The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorZhifu Chen, Zhifu Chen The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this author Liangsong Huang, Liangsong Huang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorShuo Wang, Shuo Wang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorPeng Zhang, Corresponding Author Peng Zhang [email protected] orcid.org/0009-0005-0158-9245 The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 China E-mail: [email protected]Search for more papers by this authorKun Zhang, Kun Zhang The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorYuxia Li, Yuxia Li The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this authorZhifu Chen, Zhifu Chen The College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266590 ChinaSearch for more papers by this author First published: 04 January 2024 https://doi.org/10.1002/admt.202301377Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Abstract Flexible pressure sensor is widely used in fields such as healthcare, intelligent prosthetics, and patient rehabilitation. However, how to ensure high sensitivity of the sensor while having a wide detection range remains a challenge. In order to address this challenge, a flexible pressure sensor with a wide detection range based on capacitive-piezoresistive dual mode conversion is proposed. By manufacturing circular through-holes on the dielectric layer of the sensor, the microstructure of the upper and lower electrode layers can achieve non-contact and contact switching under different pressures through the through holes. This means that the sensor remains in capacitive mode at low pressure and then in piezoresistive mode at high pressure. By cleverly combining the two modes, the measurement range can reach 2 000 kPa and high sensitivity can be maintained during mode switching. In addition, its production process is simple, the cost is low, and it has a fast response time (120 ms) and good repeatability stability. The experimental results indicate that the sensor can achieve ideal performance in proximity detection, human behavior monitoring, and ultra high-pressure detection, and has broad application prospects in providing a more powerful human-computer interaction interface and expanding more comprehensive health monitoring. Conflict of Interest The authors declare no conflict of interest. Open Research Data Availability Statement The data that support the findings of this study are available in the supplementary material of this article. Supporting Information Filename Description admt202301377-sup-0001-SuppMat.pdf515.1 KB Supporting Information admt202301377-sup-0002-VideoS1.avi5.5 MB Supporting Information Video 1 admt202301377-sup-0003-VideoS2.avi6.4 MB Supporting Information Video 2 admt202301377-sup-0004-VideoS3.mp45.6 MB Supporting Information Video 3 Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article. References 1Y. Shi, X. Lu, W. Wang, X. Meng, J. Zhao, P. Wang, G. Bai, IEEE Trans. Instrum. Meas. 2021, 70, 9511809. CASGoogle Scholar 2G. Wang, J. Yan, X. Yang, X. Qing, IEEE Sens. J. 2022, 22, 405. 10.1109/JSEN.2021.3131164 CASWeb of Science®Google Scholar 3F. Liu, S. Dai, J. Cao, Z. Zhang, G. Cheng, J. Ding, Sens. Actuators, A 2022, 343, 113672. 10.1016/j.sna.2022.113672 CASGoogle Scholar 4M. Jing, J. Zhou, P. Zhang, D. Hou, J. 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