Silicon metasurface-based infrared polarizing beam splitter with on-demand deflection angles

Polarizing beam splitters (PBSs) play an important role in applications requiring polarization multiplexing or high polarization purity. Traditional prism-based PBSs usually have large volumes, which hampers their further applications in ultracompact integrated optical systems. Here, we demonstrate a single-layer silicon metasurface-based PBS with the ability to deflect two orthogonally linearly polarized infrared light beams to on-demand angles. The metasurface consists of silicon anisotropic microstructures, which can provide different phase profiles for the two orthogonal polarization states. In experiments, two metasurfaces designed with arbitrary deflection angles for x- and y-polarized light exhibit good splitting performance at an infrared wavelength of 10 μm. We envision that this type of planar and thin PBS can be used in a series of compact thermal infrared systems.