Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints

晶圆制造 薄脆饼 计算机科学 过程(计算) 制造工程 材料科学 工程类 纳米技术 操作系统
作者
Gu Lei,Naiqi Wu,Yan Qiao,Siwei Zhang,Tan Li
出处
期刊:Applied sciences [Multidisciplinary Digital Publishing Institute]
卷期号:14 (20): 9490-9490
标识
DOI:10.3390/app14209490
摘要

To increase productivity, more sophisticated cluster tools are developed. To achieve this, one of the ways is to increase the number of spaces in a process module (PM) and the number of fingers on a robot arm as well, leading to a cluster tool with multi-space PMs and a multi-finger-arm robot. This paper discusses the scheduling problem of cluster tools with four-space PMs and a four-finger-arm robot, a typical tool with multi-space PMs and a multi-finger-arm robot adopted in modern fabs. With two arms in such a tool, one is used as a clean one, while the other is used as a dirty one. In this way, wafer quality can be improved. However, scheduling such cluster tools to ensure the residency time constraints is very challenging, and there is no research report on this issue. This article conducts an in-depth analysis of the steady-state scheduling for this type of cluster tools to explore the effect of different scheduling strategies. Based on the properties, four robot task sequences are presented as scheduling strategies. With them, four linear programming models are developed to optimize the cycle time of the system and find feasible schedules. The performance of these strategies is dependent on the activity parameters. Experiments are carried out to test the effect of different parameters on the performance of different strategies. It shows that, given a group of parameters, one can apply all the strategies and choose the best result obtained by one of the strategies.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
玛雅太阳神完成签到,获得积分10
2秒前
orixero应助一只奇怪的鸟采纳,获得10
2秒前
3秒前
5秒前
rpe发布了新的文献求助10
6秒前
我是老大应助shinble采纳,获得10
6秒前
狂奔弟弟完成签到 ,获得积分10
7秒前
7秒前
小马甲应助舒心的初兰采纳,获得10
9秒前
小酸奶发布了新的文献求助10
10秒前
拓跋听兰完成签到,获得积分10
11秒前
zhou应助wjx采纳,获得10
11秒前
zhou应助wjx采纳,获得10
12秒前
隐形曼青应助wjx采纳,获得10
12秒前
ding应助wjx采纳,获得10
12秒前
李健应助wjx采纳,获得10
12秒前
乖猫要努力应助wjx采纳,获得10
12秒前
李爱国应助wjx采纳,获得10
12秒前
思源应助wjx采纳,获得10
12秒前
何日寻完成签到,获得积分10
13秒前
苏苏发布了新的文献求助10
13秒前
ssrich完成签到,获得积分10
15秒前
16秒前
arabidopsis应助科研通管家采纳,获得10
17秒前
乐观小之应助科研通管家采纳,获得10
17秒前
华仔应助科研通管家采纳,获得10
17秒前
Ava应助科研通管家采纳,获得10
17秒前
乐观小之应助科研通管家采纳,获得10
17秒前
小二郎应助科研通管家采纳,获得10
17秒前
orixero应助wjx采纳,获得10
18秒前
上官若男应助wjx采纳,获得10
19秒前
希望天下0贩的0应助wjx采纳,获得10
19秒前
wanci应助wjx采纳,获得10
19秒前
赘婿应助wjx采纳,获得10
19秒前
乐乐应助wjx采纳,获得10
19秒前
我是老大应助wjx采纳,获得10
19秒前
Akim应助wjx采纳,获得10
19秒前
Hello应助wjx采纳,获得10
19秒前
领导范儿应助wjx采纳,获得10
19秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3975458
求助须知:如何正确求助?哪些是违规求助? 3519866
关于积分的说明 11199996
捐赠科研通 3256213
什么是DOI,文献DOI怎么找? 1798133
邀请新用户注册赠送积分活动 877386
科研通“疑难数据库(出版商)”最低求助积分说明 806305