An Ultrasonic Tweezer With Multiple Manipulation Functions Based on the Double-Parabolic-Reflector Wave-Guided High-Power Ultrasonic Transducer

The development of ultrasonic tweezers with multiple manipulation functions is challenging. In this work, multiple advanced manipulation functions are implemented for a single-probe-type ultrasonic tweezer with the double-parabolic-reflector wave-guided high-power ultrasonic transducer (DPLUS). Due to strong high-frequency (1.49 MHz) linear vibration at the manipulation probe's tip, which is excited by the DPLUS, the ultrasonic tweezer can capture microobjects in a noncontact mode and transport them freely above the substrate. The captured microobjects that adhere to the probe's tip in the low-frequency (154.4 kHz) working mode can be released by tuning the working frequency. The results of the finite-element method analyses indicate that the manipulations are caused by the acoustic radiation force.