Porosity in low dielectric constant SiOCH films depth profiled by positron annihilation spectroscopy

正电子湮没谱学 电介质 材料科学 多孔性 分析化学(期刊) 弹性后坐力检测 X射线光电子能谱 化学气相沉积 正电子 退火(玻璃) 光谱学 薄膜 化学 复合材料 核磁共振 正电子湮没 纳米技术 核物理学 电子 物理 量子力学 光电子学 色谱法
作者
R. S. Brusa,M. Spagolla,Grzegorz P. Karwasz,Antonio Zecca,G. Ottaviani,Federico Corni,M. Bacchetta,E. Carollo
出处
期刊:Journal of Applied Physics [American Institute of Physics]
卷期号:95 (5): 2348-2354 被引量:45
标识
DOI:10.1063/1.1644925
摘要

The 3γ annihilation of orthopositronium and the Doppler broadening of the positron annihilation line have been measured by implanting low energy positrons in low dielectric constant (low-k) SiOCH films. The evolution and stability of film porosity with thermal treatments in the 400–900 °C temperature range has been studied. The films have been produced by plasma enhanced chemical vapor deposition and after annealing in N2 atmospheres at 480 °C have been treated in N2+He plasma. The minimum free volume of the pores in the as-produced samples has been estimated to correspond to that of a sphere with radius r=0.6 nm. The treatment in the N2 plasma was found to seal the pores up to 45 nm depth. Both the composition of the films (as obtained by Rutherford backscattering spectroscopy and elastic recoil detection analysis) and the chemical environment of the pores probed by positrons were found to be very stable up to 600 °C thermal treatment. Above such a temperature a reduction of the hydrogen content accompanied by a change in the structure and in the chemical environment of the pores has been observed. In the samples thermal treated at 800–900 °C, the positronium formation is reduced by one-third respect with the as produced sample. In the annealed and as-produced films, a natural aging of 30 days in air was enough to contaminate the porosity, as pointed out by a strong reduction of the 3γ annihilations. The effect of contamination and the distribution of the pores were completely recovered after a thermal treatment at 400 °C. Artificial aging of SiOCH films in controlled atmospheres of H2, O2, H2O has shown that H2O is the more efficient contaminant in reducing the effective volume of the pores.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
小太阳发布了新的文献求助10
刚刚
1秒前
大胆班完成签到,获得积分10
1秒前
1秒前
Lynn完成签到 ,获得积分10
2秒前
愉快寒香完成签到,获得积分20
2秒前
2秒前
Cupid完成签到,获得积分10
3秒前
3秒前
3秒前
lalala发布了新的文献求助10
4秒前
魔幻勒完成签到 ,获得积分10
4秒前
史小霜发布了新的文献求助10
4秒前
甜崽发布了新的文献求助10
4秒前
愉快寒香发布了新的文献求助10
4秒前
5秒前
zhang完成签到,获得积分10
5秒前
果实发布了新的文献求助10
5秒前
辽阳太子完成签到 ,获得积分10
5秒前
李健的粉丝团团长应助jack采纳,获得10
6秒前
zzzzzzj发布了新的文献求助10
6秒前
7秒前
领导范儿应助白桃采纳,获得10
7秒前
铠甲勇士完成签到,获得积分10
7秒前
卡酷发布了新的文献求助10
7秒前
易吴鱼完成签到 ,获得积分10
8秒前
9秒前
梁婷完成签到,获得积分20
9秒前
黑桃完成签到,获得积分10
11秒前
12秒前
梁婷发布了新的文献求助10
12秒前
大个应助llllx采纳,获得10
13秒前
阳光灿烂完成签到,获得积分10
13秒前
过于傻逼发布了新的文献求助10
14秒前
15秒前
花花哈完成签到,获得积分10
15秒前
李健应助梁婷采纳,获得10
16秒前
17秒前
18秒前
swiftie完成签到,获得积分10
18秒前
高分求助中
Ophthalmic Equipment Market by Devices(surgical: vitreorentinal,IOLs,OVDs,contact lens,RGP lens,backflush,diagnostic&monitoring:OCT,actorefractor,keratometer,tonometer,ophthalmoscpe,OVD), End User,Buying Criteria-Global Forecast to2029 2000
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Cognitive Neuroscience: The Biology of the Mind (Sixth Edition) 1000
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 588
Christian Women in Chinese Society: The Anglican Story 500
A Preliminary Study on Correlation Between Independent Components of Facial Thermal Images and Subjective Assessment of Chronic Stress 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3960985
求助须知:如何正确求助?哪些是违规求助? 3507215
关于积分的说明 11134512
捐赠科研通 3239640
什么是DOI,文献DOI怎么找? 1790273
邀请新用户注册赠送积分活动 872328
科研通“疑难数据库(出版商)”最低求助积分说明 803149