Porosity in low dielectric constant SiOCH films depth profiled by positron annihilation spectroscopy

正电子湮没谱学 电介质 材料科学 多孔性 分析化学(期刊) 弹性后坐力检测 X射线光电子能谱 化学气相沉积 正电子 退火(玻璃) 光谱学 薄膜 化学 复合材料 核磁共振 正电子湮没 纳米技术 核物理学 物理 光电子学 色谱法 量子力学 电子
作者
R. S. Brusa,M. Spagolla,Grzegorz P. Karwasz,Antonio Zecca,G. Ottaviani,Federico Corni,M. Bacchetta,E. Carollo
出处
期刊:Journal of Applied Physics [American Institute of Physics]
卷期号:95 (5): 2348-2354 被引量:45
标识
DOI:10.1063/1.1644925
摘要

The 3γ annihilation of orthopositronium and the Doppler broadening of the positron annihilation line have been measured by implanting low energy positrons in low dielectric constant (low-k) SiOCH films. The evolution and stability of film porosity with thermal treatments in the 400–900 °C temperature range has been studied. The films have been produced by plasma enhanced chemical vapor deposition and after annealing in N2 atmospheres at 480 °C have been treated in N2+He plasma. The minimum free volume of the pores in the as-produced samples has been estimated to correspond to that of a sphere with radius r=0.6 nm. The treatment in the N2 plasma was found to seal the pores up to 45 nm depth. Both the composition of the films (as obtained by Rutherford backscattering spectroscopy and elastic recoil detection analysis) and the chemical environment of the pores probed by positrons were found to be very stable up to 600 °C thermal treatment. Above such a temperature a reduction of the hydrogen content accompanied by a change in the structure and in the chemical environment of the pores has been observed. In the samples thermal treated at 800–900 °C, the positronium formation is reduced by one-third respect with the as produced sample. In the annealed and as-produced films, a natural aging of 30 days in air was enough to contaminate the porosity, as pointed out by a strong reduction of the 3γ annihilations. The effect of contamination and the distribution of the pores were completely recovered after a thermal treatment at 400 °C. Artificial aging of SiOCH films in controlled atmospheres of H2, O2, H2O has shown that H2O is the more efficient contaminant in reducing the effective volume of the pores.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
牛牛123完成签到 ,获得积分10
1秒前
1秒前
肥肉叉烧发布了新的文献求助10
1秒前
2秒前
3秒前
壮观的外绣完成签到,获得积分10
3秒前
FP完成签到 ,获得积分10
3秒前
失眠墨镜完成签到,获得积分10
4秒前
知鸢完成签到 ,获得积分10
4秒前
打打应助白白嫩嫩采纳,获得10
4秒前
薰硝壤应助明天更好采纳,获得10
4秒前
重要的板凳完成签到,获得积分10
5秒前
5秒前
且听风吟完成签到 ,获得积分10
6秒前
wen完成签到,获得积分10
6秒前
斯文败类应助CATH采纳,获得10
7秒前
早晨发布了新的文献求助10
7秒前
背后翩跹发布了新的文献求助10
7秒前
Orange应助NOEYEDEER采纳,获得10
8秒前
dreamon发布了新的文献求助10
8秒前
Orange应助肥肉叉烧采纳,获得10
9秒前
lz123完成签到,获得积分10
9秒前
尘埃之影完成签到,获得积分10
9秒前
10秒前
10秒前
在水一方应助MoO采纳,获得10
11秒前
FEIFEI完成签到,获得积分10
12秒前
viahit发布了新的文献求助10
14秒前
大模型应助优秀的寄灵采纳,获得10
14秒前
15秒前
15秒前
大模型应助圆彰七大采纳,获得10
15秒前
李多多发布了新的文献求助10
15秒前
鱼鱼鱼完成签到,获得积分10
16秒前
dreamon完成签到,获得积分10
16秒前
16秒前
16秒前
16秒前
可爱多完成签到,获得积分10
17秒前
诚心的冬亦完成签到,获得积分10
17秒前
高分求助中
Sustainability in Tides Chemistry 2800
The Young builders of New china : the visit of the delegation of the WFDY to the Chinese People's Republic 1000
юрские динозавры восточного забайкалья 800
English Wealden Fossils 700
Chen Hansheng: China’s Last Romantic Revolutionary 500
XAFS for Everyone 500
COSMETIC DERMATOLOGY & SKINCARE PRACTICE 388
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3143342
求助须知:如何正确求助?哪些是违规求助? 2794538
关于积分的说明 7811563
捐赠科研通 2450725
什么是DOI,文献DOI怎么找? 1304041
科研通“疑难数据库(出版商)”最低求助积分说明 627160
版权声明 601386