High-angle annular dark-field scanning transmission electron microscopy and electron energy-loss spectroscopy of nano-granular Co–Al–O alloys

Atomic structures of cobalt–aluminum–oxygen nano-granular films prepared by reactive rf-sputtering from CoAl alloys in oxygen gas were investigated by high-angle annular dark-field scanning transmission electron microscopy and electron energy-loss spectroscopy to clarify the atomic structures of the films and the interfacial layers in relation with their magnetic properties and tunnel magneto-resistance.