材料科学
空位缺陷
退火(玻璃)
多普勒展宽
正电子
正电子湮没谱学
透射电子显微镜
微晶
离子
微观结构
晶界
结晶学
分子物理学
分析化学(期刊)
凝聚态物理
谱线
电子
正电子湮没
物理
化学
纳米技术
核物理学
冶金
量子力学
色谱法
天文
作者
Xia Zhang,Peng Qin,Youlin Peng,Bo Ma,Jiangbo Hu,Shijun Fan,Binhua Hu,Guohua Zhang,Hua Yuan,Wei Yan,Weilan Chen,Bin Tu,Hang He,Bingtian Ma,Yuping Wang,Shigui Li
标识
DOI:10.1016/j.jgg.2019.02.001
摘要
The evolution of He implantation-induced defects in polycrystalline α-SiC has been investigated by a combination of positron annihilation Doppler broadening spectroscopy (DBS) and transmission electron microscopy (TEM). Samples implanted at room temperature with 230 keV He+ ions to fluences of 1 × 1015, 5 × 1015 and 1 × 1016 ions/cm2 were isochronally annealed in vacuum at temperatures up to 1400 °C with a step of 100 °C. Excellent correlation between the calculated damage profile and the positron annihilation depth profile were obtained at low annealing temperatures, after considering the positron depth distribution given by so-called Makhovian profiles.The DBS data from the peak region revealed a reasonable correlation between positron trapping at vacancy-type defects and the He-to-dpa ratio. Thermal annealing at 1400 °C resulted in the incomplete recovery of the microstructure, where large cavities distributed along grain boundaries in the damage peak region are surrounded by small agglomerations of (helium)vacancy-type defects.
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