Correlation between <I>I</I><SUB>D</SUB>⁄<I>I</I><SUB>G</SUB> Ratio from Visible Raman Spectra and sp<SUP>2</SUP>/sp<SUP>3</SUP> Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

The hydrogened diamond like carbon film (DLCH) with 1 μm thickness is made by hydrocarbon gas ion beam deposition method. The relationship between ID⁄IG ratio fitted from visible Raman spectra and sp2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID⁄IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID⁄IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.