Improvement of Adhesion between High-Frequency-Compatible Substrates with Low Dielectric Constants and Electroless Plated Copper Films Using a Vacuum Ultraviolet Treatment

材料科学 电介质 光电子学 介电损耗 基质(水族馆) 半导体 耗散因子 复合材料 海洋学 地质学
作者
Taro Arimoto,Masaki Miura,Fumitoshi Takemoto
标识
DOI:10.1109/impact59481.2023.10348633
摘要

With the development of sophisticated and faster semiconductors, research is focusing on semiconductors that can work within high-frequency bands ranging from millimeter waves to sub-terahertz waves. To develop these semiconductors, the circuit substrates used for communication terminals and base stations should be capable of reducing signal attenuation or transmission loss, which increases at higher frequencies. Transmission loss is defined as the sum of dielectric loss and conductor loss. Dielectric losses can be reduced using a substrate material with a low dielectric constant (Dk) and a dielectric loss tangent (Df). Conductor losses are primarily due to the surface roughness and skin effect losses of its material at high frequencies. To reduce conductor losses, good adhesion should be achieved between the substrate and the conductor film without roughening the surface of the packaged substrate, i.e., the roughness at the interface between the wiring and the substrate should be low (Fig. 1). Cyclo olefin polymer (COP) is a suitable material for the next generation flexible substrates that allow high-speed transmission because of its dielectric properties. Vacuum ultraviolet (VUV, λ = 172 nm) excimer radiation with a photon energy large enough to break down organic matter can be used for the hydrophilization of polymer surfaces. Furthermore, under air atmosphere, the O 2 can be photolyzed by absorbing a VUV light to generate reactive oxygen species such as O(1D), O(3P), and O 3 . The reactive oxygen species that are produced can then initiate chemical reactions on the surface of materials being processed. (Fig. 2). This allows the formation of stronger interactions, which improve the adhesion between the surface and coating without the need for a conventional anchoring effect. [1], [2] In our previous study, [3], [4] we reported the surface modification of COP films by a VUV light, which resulted in an improvement of the adhesion strength between an electroless deposited copper and the COP substrate without roughening the surface. In this study, we analyzed the role of interface composition for achieving a good adhesion between the COP substrates and the deposited metal using a VUV-light irradiation without roughening their surfaces. Moreover, the mechanisms for achieving a strong adhesion between the substrates and electroless deposited copper by VUV-light irradiation were investigated.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
bulingbuling完成签到 ,获得积分10
刚刚
一颗小纽扣完成签到,获得积分10
1秒前
席涑完成签到,获得积分10
2秒前
CipherSage应助拼搏的婷冉采纳,获得10
2秒前
luoluo完成签到 ,获得积分10
3秒前
3秒前
醋炒栗子仁完成签到,获得积分10
3秒前
墨尔根戴青完成签到,获得积分10
4秒前
瑾瑜完成签到,获得积分10
5秒前
文小杰完成签到,获得积分10
5秒前
山月完成签到,获得积分10
6秒前
CodeCraft应助研友_LOK59L采纳,获得10
6秒前
6秒前
7秒前
欣慰妙海完成签到 ,获得积分20
7秒前
CodeCraft应助zhaopeipei采纳,获得10
7秒前
LIUYONG发布了新的文献求助10
8秒前
lin发布了新的文献求助10
10秒前
11秒前
九湖夷上完成签到 ,获得积分10
11秒前
噼里啪啦完成签到 ,获得积分10
12秒前
大个应助hahaha123213123采纳,获得30
12秒前
12秒前
惊天大幂幂完成签到,获得积分10
12秒前
英姑应助Fang Xianxin采纳,获得10
13秒前
宋老师发布了新的文献求助30
13秒前
王洋完成签到,获得积分10
14秒前
lw777完成签到,获得积分20
14秒前
慢慢完成签到,获得积分10
14秒前
15秒前
靖123456发布了新的文献求助10
15秒前
拓跋箴完成签到,获得积分10
15秒前
彭于晏应助zy采纳,获得10
16秒前
精明玲完成签到 ,获得积分10
17秒前
17秒前
乐乐完成签到,获得积分10
18秒前
VirSnorlax完成签到,获得积分10
18秒前
SciGPT应助LL采纳,获得10
18秒前
妖孽宇发布了新的文献求助10
19秒前
aa完成签到,获得积分20
19秒前
高分求助中
【提示信息,请勿应助】关于scihub 10000
Les Mantodea de Guyane: Insecta, Polyneoptera [The Mantids of French Guiana] 3000
徐淮辽南地区新元古代叠层石及生物地层 3000
The Mother of All Tableaux: Order, Equivalence, and Geometry in the Large-scale Structure of Optimality Theory 3000
Global Eyelash Assessment scale (GEA) 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 550
Research on Disturbance Rejection Control Algorithm for Aerial Operation Robots 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 4038388
求助须知:如何正确求助?哪些是违规求助? 3576106
关于积分的说明 11374447
捐赠科研通 3305798
什么是DOI,文献DOI怎么找? 1819322
邀请新用户注册赠送积分活动 892672
科研通“疑难数据库(出版商)”最低求助积分说明 815029