材料科学
弹性模量
氮化硅
氮化物
硅
纳米压痕
复合材料
模数
冶金
图层(电子)
作者
Xiaoqi Zhang,Siwen Cui,Shuailing Ma,Wang Chen,Yufei Ge,Xingbin Zhao,Hui Li,Min Lian,Qiang Tao,Tian Cui,Pinwen Zhu
摘要
Transparent silicon nitrides exhibit rich crystal structures, higher hardness, high elastic constant and are suitable to investigate the relationship between elastic modulus and hardness. In this work, due to the difficulty of synthesizing single crystal, transparent polycrystalline silicon nitrides were prepared by high pressure and high temperature method because the transparent polycrystalline Si3N4 exhibit nearly intrinsic hardness of single crystals. By using in-situ high-pressure X-ray diffraction, Vickers hardness and nano-indentation measurement, the hardness and elastic modulus of transparent polycrystalline silicon nitrides were measured. The BM-EoS fitting of high-pressure X-ray diffraction give bulk modulus of K0α=266.7±9GPa, K0β=240.6±7GPa, K0γ=335.5±10GPa for α-Si3N4, β-Si3N4 and γ-Si3N4. This is consistent with nanoindentation results and demonstrates that the elastic modulus of transparent Si3N4 is close to that of single crystal. The nanoindentations measurement of α-Si3N4, β-Si3N4, γ-Si3N4 give hardness of Hvα=30.3±1.0 GPa, Hvβ=25.7±0.6 GPa, Hvγ=45.9±0.4 GPa. The different stacking order of [SiN4] tetrahedrons result in different bonding configurations and hardness. According to the elastic constants and hardness value, hardness is linearly proportional to the elastic modulus of silicon nitrides, and can be used to predict hardness directly.
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