High-transition-temperature nanoscale superconducting quantum interference devices directly written with a focused helium ion beam

In this work, we present nanoscale superconducting quantum interference devices (SQUIDs) with dimensions as small as 10 nm from the high-transition-temperature superconductor YBa2Cu3O7−δ (YBCO). The SQUID features and Josephson junctions are directly written into a 35-nm thick YBCO film with a focused helium ion beam. We integrate these nano-SQUIDs with directly written nano-isolated inductively coupled control lines to demonstrate a low power superconducting output driver capable of transimpedance conversion over a very wide temperature range of 4–50 K.