Microsphere-assisted Fabry–Perot interferometry: proof of concept

We propose a microsphere-assisted Fabry-Perot interferometry (MAFPI) for microstructure measurement. We stretch the single-mode fiber and combine it with microspheres of different sizes and refractive indices, which can form super-focused spots with different characteristics, that is, a photonic nanojet phenomenon. As a proof of principle, we performed scanning imaging of optical discs and holographic gratings by MAFPI. The optical disc image obtained by MAFPI is consistent with the result obtained by a scanning electron microscope, and the obtained grating image is consistent with the actual result.