材料科学
纳米结构
反应离子刻蚀
有机发光二极管
光电子学
黑硅
蚀刻(微加工)
二极管
发光二极管
折射率
平版印刷术
干扰(通信)
硅
光学
纳米技术
物理
工程类
频道(广播)
电气工程
图层(电子)
作者
Ju Sung Lee,Yong Sub Shim,Chan Hyuk Park,Ha Hwang,Jae Geun Kim,Chul Woong Joo,Woo Jin Sung,Jonghee Lee,Young Wook Park,Byeong‐Kwon Ju
摘要
Here, we fabricate organic light‐emitting diodes (OLEDs) with quasi‐periodic nanostructure (QPS) processed both by laser interference lithography (LIL) and reactive ion etching (RIE). The LIL process is used for forming periodic pattern, and on the periodic pattern, the RIE process is supplemented for adding random property. The resulting quasi‐periodic nanostructure is composed of the silicon dioxide (SiO 2 ) having low refractive index, and we were able to obtain enhanced light extraction characteristics of OLEDs in all viewing angle without any spectrum distortion problem, by utilizing each optical advantage of periodic and random structure.
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