Application of the Electrostatic Micro-Speakers for Producing Audible Directional Sound

In recent years, the demand for control of sound power and radiation patterns in personal messaging, calls, automotive entertainment, and gaming has brought a new interest in the audio world. The aim of this paper is to investigate the feasibility of producing the sound waves in the audible range and directing them in the desired listening zone by electrostatic micro-speakers. Therefore, a capacitive circular micro-plate has been modeled as an electrostatic micro-speaker. Then a Bessel panel array has been developed using a number of these plates arranged in a square array. The equations governing the vibrations of the micro-speaker’s diaphragm, as well as radiation pattern of the sound waves, have been introduced and solved. The results have shown that the Micro-Electro Mechanical Systems (MEMS) electrostatic diaphragms have the capability of producing the directional sound in the human hearing range. Moreover, we have investigated the effect of different excitation frequencies, radii size and the number of the diaphragms as well as the inter-element spacing on the sound radiation pattern of the Bessel panel array.