材料科学
涂层
薄膜
物理气相沉积
氮化物
溅射沉积
合金
溅射
腐蚀
基质(水族馆)
冶金
复合材料
图层(电子)
纳米技术
海洋学
地质学
作者
Sai Krishna Padamata,Andrey Yasinskiy,V. V. Yanov,Guðrún Sævarsdóttir
出处
期刊:Metals
[Multidisciplinary Digital Publishing Institute]
日期:2022-02-11
卷期号:12 (2): 319-319
被引量:44
摘要
Surface coatings can enhance the substrate material’s properties and increase its lifetime. HEA-based materials have been extensively investigated as coating materials due to their superior hardness, excellent oxidation and corrosion resistance, effective diffusion barrier properties and wear resistance. Magnetron sputtering has been regarded as one of the most efficient methods for the deposition of HEA-based thin films. Metallic- and nitride-based HEA coatings can be easily deposited by introducing N2 gas along with the Ar in the reaction chamber. The parameters such as target composition, bias voltage, sputtering power and notably, gas flow ratio, influence the thin film’s morphology and mechanical properties.
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