(Invited) Development of the Battery-Driven SnO2 Thin Film Gas Sensor

We have developed a micro methane sensor obtained by laminating “nano-columnar structure SnO 2 thin film" and catalyst layer on the circular diaphragm support layer with a built-in thin film heater. Ultra-low power consumption (0.06mW) required for 5 year battery operation was achieved by separating the functional elements of gas sensors, optimizing the materials and structures in charge of each function, microminiaturizing, and driving with low power ultra-short pulse. Furthermore, this sensor has realized higher sensitivity and higher selectivity than conventional methane sensors. In May 2015, Osaka Gas released the world's first battery-driven city gas alarm equipped with this sensor.