微加工
微电子机械系统
纳米技术
材料科学
计算机科学
冶金
制作
医学
病理
替代医学
标识
DOI:10.1002/9780470602638.ch28
摘要
This chapter contains sections titled: Introduction Microfabrication Techniques Characteristic Features of Electrodeposition through High-AR Patterns Electrodeposition of Metals and Alloys for MEMS Magnetic MEMS and Electrodeposition of Magnetic Materials Acknowledgment References
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