微电子机械系统
材料科学
光电子学
电压
绝缘体上的硅
激光器
波长
光学
电气工程
物理
硅
工程类
作者
Arnhold Simonsen,Masoud Payandeh,Søren Engelberth Hansen,Andrey Marchevsky,Gyeong Cheol Park,Hitesh Kumar Sahoo,Elizaveta Semenova,Ole Hansen,Kresten Yvind
出处
期刊:Optics Letters
[The Optical Society]
日期:2024-01-08
卷期号:49 (4): 802-802
摘要
Microelectromechanical system (MEMS) vertical cavity surface-emitting lasers (VCSELs) are the fastest coherently tunable lasers (nm/ns) due to their unique Doppler-assisted tuning mechanism. However, in standard electrostatic actuation, the response is highly nonlinear and large (>100 V) dynamic voltages are needed for MHz sweep rates. We present a bidirectional MEMS VCSEL as a solution to these challenges where static voltages can be used to enable substantially linear and amplified wavelength tuning with respect to the fast tuning (MEMS) voltage. Using an InP/SOI MEMS bonded structure, we show a tuning range of 54.5 nm (gain limited) centered around 1586 nm at an actuation frequency of 2.73 MHz.
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