碳纳米管
蚀刻(微加工)
材料科学
润湿
纳米技术
数码产品
光电子学
薄脆饼
晶体管
等离子体刻蚀
电气工程
复合材料
电压
工程类
图层(电子)
作者
Rui Qiu,Qinqi Ren,Qi Liu,Lei Lü,Min Zhang
标识
DOI:10.1109/nmdc46933.2022.10052161
摘要
Non-destructive patterning of low-dimensional materials has always been a challenge. An etching-free patterning method for high-density carbon nanotube (CNT) network has been proposed based on a wettability modulation method. By adopting this method, we have realized high-resolution patterns of CNT films, which have been uniformly formed on the wetting regions with precise boundaries. A flexible thin-film transistor array has been further realized, which shows excellent electrical performance with on/off current ratio of 10 4 as well as subthreshold swing of 280 mV/dec. This high-efficiency, high-resolution, and etching-free patterning approach of CNTs holds great promise for numerous potential applications in flexible and stretchable electronics and provides general solution for the low-temperature low-dimension material fabrications of advanced electronics.
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