In this study, a rapid thermal process, which can be achieved via the conventional glass tempering process, was utilized to fabricate silica-based superhydrophilic antifogging coatings with micro-nano hierarchical roughness on glass substrates. The effects of SiO2 nanoparticle and triethylborate loadings on the coatings’ properties have been systematically investigated. Moreover, the formation mechanism of such coatings has been explained. The optimal coatings demonstrate a high level of hydrophilicity with a water contact angle (WCA) of ∼ 0°. Meanwhile, such coatings exhibit good antifogging effect and robustness as well.