One-Step Laser Direct-Printing Process of a Hybrid Microstructure for Highly Sensitive Flexible Piezocapacitive Sensors

Microstructures can effectively improve the sensing performance of flexible piezocapacitive sensors. Simple, low-cost fabrication methods for microstructures are key to facilitating the practical application of piezocapacitive sensors. Herein, based on the laser thermal effect and the thermal decomposition of glucose, a rapid, simple, and low-cost laser direct-printing process is proposed for the preparation of a polydimethylsiloxane (PDMS)-based electrode with a hybrid microstructure. Combining the PDMS-based electrode with an ionic gel film, highly sensitive piezocapacitive sensors with different hybrid microstructures are realized. Due to the good mechanical properties brought about by the hybrid microstructure and the double electric layer induced by the ionic gel film, the sensor with a porous X-type microstructure exhibits an ultrahigh sensitivity of 92.87 kPa-1 in the pressure range of 0-1000 Pa, a wide measurement range of 100 kPa, excellent stability (>3000 cycles), fast response time (100 ms) and recovery time (101 ms), and good reversibility. Furthermore, the sensor is used to monitor human physiological signals such as throat vibration, pulse, and facial muscle movement, demonstrating the application potential of the sensor in human health monitoring. Most importantly, the laser direct-printing process provides a new strategy for the one-step preparation of hybrid microstructures on thermal curing polymers.