吞吐量
全息术
硅上液晶
纳米制造
数字光处理
空间光调制器
材料科学
光学
3D打印
纳米技术
光电子学
物理
计算机科学
液晶
电信
复合材料
无线
投影机
作者
Leran Zhang,Chaowei Wang,Chenchu Zhang,Yuhang Xue,Zhaohui Ye,Liqun Xu,Yanlei Hu,Jiawen Li,Jiaru Chu,Dong Wu
出处
期刊:Nano Letters
[American Chemical Society]
日期:2024-02-20
卷期号:24 (8): 2671-2679
被引量:12
标识
DOI:10.1021/acs.nanolett.4c00505
摘要
The emerging two-photon polymerization (TPP) technique enables high-resolution printing of complex 3D structures, revolutionizing micro/nano additive manufacturing. Various fast scanning and parallel processing strategies have been proposed to promote its efficiency. However, obtaining large numbers of uniform focal spots for parallel high-speed scanning remains challenging, which hampers the realization of higher throughput. We report a TPP printing platform that combines galvanometric mirrors and liquid crystal on silicon spatial light modulator (LCoS-SLM). By setting the target light field at LCoS-SLM's diffraction center, sufficient energy is acquired to support simultaneous polymerization of over 400 foci. With fast scanning, the maximum printing speed achieves 1.49 × 108 voxels s–1, surpassing the existing scanning-based TPP methods while maintaining high printing resolution and flexibility. To demonstrate the processing capability, functional 3D microstructure arrays are rapidly fabricated and applied in micro-optics and micro-object manipulation. Our method may expand the prospects of TPP in large-scale micro/nanomanufacturing.
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