The Electrical Properties of Asymmetric Schottky Contact Thin-Film Transistors with Amorphous-$\hbox{In}_{2}\hbox{Ga}_{2}\hbox{ZnO}_{7}$

肖特基二极管 薄膜晶体管 材料科学 无定形固体 肖特基势垒 光电子学 整改 偏压 晶体管 二极管 拓扑(电路) 电气工程 图层(电子) 纳米技术 结晶学 电压 化学 工程类
作者
Sang Ho Rha,Un Ki Kim,Jisim Jung,Hyo Kyeom Kim,Yoon Soo Jung,Eun Suk Hwang,Yoon Jang Chung,Mi Jung Lee,Jung‐Hae Choi,Cheol Seong Hwang
出处
期刊:IEEE Transactions on Electron Devices [Institute of Electrical and Electronics Engineers]
卷期号:60 (3): 1128-1135 被引量:18
标识
DOI:10.1109/ted.2012.2236558
摘要

Asymmetric Schottky contact thin-film-transistors (ASC-TFTs) with an amorphous- In 2 Ga 2 ZnO 7 channel were fabricated, and their operation characteristics were examined. Ti, Ni, and Pt were evaluated as source/drain metal, and the variations in the device performance were analyzed in terms of energy level and bias polarity, which were carefully simulated to understand the influence of the contact properties on the device performance. The contact nature largely influenced the distribution of potential under the given gate and drain biases, as well as the accompanying carrier accumulation layer and current path formation. Schottky-type contact induced conduction path formation even on the back surface of the channel when drain voltage was high even with sufficiently high gate bias being applied. Based on these results, by applying different metal for each source and drain metal, ASC-TFTs integrating TFTs and Schottky diodes were fabricated, which showed a rectification ratio of drain current higher than 10 8 according to the bias direction. In addition, the transfer and output characteristics of ASC-TFTs were evaluated for various operation regimes, and the roles of the Schottky junction in device operation were studied in detail.

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