Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering

材料科学 微观结构 合金 溅射沉积 氮化物 高功率脉冲磁控溅射 溅射 偏压 光电子学 电压 冶金 复合材料 薄膜 纳米技术 电气工程 图层(电子) 工程类
作者
Xiangyu Zhang,Vasiliy Pelenovich,Yan Liu,Xianwen Ke,Jun Zhang,Bing Yang,Guanbing Ma,Ming Li,Xianbin Wang
出处
期刊:Vacuum [Elsevier BV]
卷期号:195: 110710-110710 被引量:54
标识
DOI:10.1016/j.vacuum.2021.110710
摘要

(TiVCrNbSiTaBY)N high entropy alloy nitride (HEAN) coatings have been deposited onto Si (100) and cemented carbide substrates by radio frequency magnetron sputtering. The deposition is carried out at different bias voltages to study its influence on microstructure, morphology, mechanical properties and tribological behaviour of the coatings. Grazing Incidence X-Ray Diffraction (GIXRD) technique shows that all coatings exhibit single NaCl-type face-centered cubic (FCC) crystal structure, while the preferred orientation of the crystal structure is greatly affected by the bias voltages. High resolution transmission electron microscopy (TEM) reveals that the structure of the coatings is a mixture of amorphous-like phase and FCC crystal structure, which is in agreement with GIXRD data. Cross-sectional Scanning Electron Microscopy (SEM) images exhibit that the columnar structure of the coatings gradually transforms into a featureless dense structure with the increase of bias voltage. SEM and Atomic Force Microscopy reveal that the surface morphology become smoother with increasing bias voltage. The (TiVCrNbSiTaBY)N HEAN coating deposited at a specific bias voltage exhibit a high hardness of 32.2 GPa. The friction coefficient is significantly influenced by the variation of the coatings surface roughness. Tribological tests for coating deposited without and at low bias voltage show that the wear behavior of the coatings is severe abrasive wear and adhesive wear, while at high bias voltage the slight abrasive wear appears. By applying the substrate bias voltage, the (TiVCrNbSiTaBY)N coatings exhibit excellent mechanical and tribological performance, which can be a promising candidate for protective coating in cutting tools or components. • Structure of coatings is a mixture of amorphous-like and FCC phases. • Columnar structure transforms into a dense structure with increasing bias. • Coating deposited at bias of −150 V exhibits high hardness of 32.2 GPa. • Wear mechanism is greatly affected by bias voltage.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
滚柱丝杠发布了新的文献求助10
1秒前
1秒前
tanrui完成签到,获得积分10
2秒前
dzbb发布了新的文献求助10
3秒前
3秒前
orixero应助迷人的舞仙采纳,获得10
3秒前
淡定映之完成签到,获得积分20
3秒前
3秒前
4秒前
4秒前
我爱蓝胖子完成签到,获得积分10
5秒前
clyde凌丫发布了新的文献求助10
5秒前
Amy完成签到,获得积分10
5秒前
无奈的老姆完成签到,获得积分20
6秒前
6秒前
7秒前
MESSY发布了新的文献求助10
7秒前
8秒前
factor发布了新的文献求助10
9秒前
依古比古发布了新的文献求助10
9秒前
sunsun10086完成签到 ,获得积分10
9秒前
LYSM应助范范采纳,获得20
9秒前
9秒前
橙子发布了新的文献求助10
9秒前
王思凯发布了新的文献求助10
9秒前
10秒前
10秒前
feihua完成签到,获得积分20
10秒前
晶晶发布了新的文献求助30
10秒前
kerr完成签到,获得积分10
11秒前
555557应助快乐科研采纳,获得10
11秒前
香蕉觅云应助So采纳,获得10
12秒前
12秒前
12秒前
12秒前
秋纳瑞完成签到 ,获得积分10
12秒前
时柚发布了新的文献求助10
13秒前
13秒前
澡雪发布了新的文献求助10
13秒前
高分求助中
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
Effective Learning and Mental Wellbeing 300
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3974856
求助须知:如何正确求助?哪些是违规求助? 3519400
关于积分的说明 11198085
捐赠科研通 3255563
什么是DOI,文献DOI怎么找? 1797860
邀请新用户注册赠送积分活动 877208
科研通“疑难数据库(出版商)”最低求助积分说明 806219