薄脆饼
职位(财务)
计算机科学
过程(计算)
晶圆制造
晶片测试
工程类
电子工程
电气工程
财务
经济
操作系统
作者
Yi-Cheng Chen,Yun-Yen Lee,Ju-Yi Lee,Jianyou Chen
出处
期刊:Society of Instrument and Control Engineers of Japan
日期:2011-10-27
卷期号:: 1938-1943
被引量:3
摘要
This study implements a system for determining the precise location of a moving wafer in a process chamber. An array of optical sensors positioned along an axis transverse to the path of a moving wafer is employed in this wafer positioning system. A computer program for wafer center calculation is developed based on the time dependent signals from the optical sensing module. The developed computer program has a human machine interface, and estimates the center position as well as the moving direction of the wafer.
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