化学吸附
选择性
分子
调制(音乐)
基质(水族馆)
光电子学
材料科学
氧化物
吸附
化学
纳米技术
声学
催化作用
物理
地质学
有机化学
冶金
海洋学
生物化学
作者
Meng Li,Junqing Chang,Zanhong Deng,Longqing Mi,Mahesh Kumar,Shimao Wang,Yong He,Gang Meng
标识
DOI:10.1016/j.snb.2022.133115
摘要
Though temperature modulation has demonstrated its capability in addressing selectivity issue of metal oxide semiconductor (MOS) gas sensors, integration of (micro)heater not only drastically adds power consumption and device manufacture complexity, but also hinders the use of flexible polymer substrate/platform. Exploring an approach enabling outstanding selectivity at room temperature (RT) is highly required, but it remains a big challenge. Herein, UV light modulation (ULM) with a rectangular UV wave has been proposed to regulate the transient response signals of sensor arrays, composed of ZnO/(Sr0.6Bi0.305)2Bi2O7 (ZnO/SBO), ZnO and In2O3. Upon pulsed UV excitation, chemisorption (or redox reaction) of injected target vapors (on MOS surface) could be activated at RT. Arising from the specific gas/MOS binding configurations for different gases and MOSs, quite different recovery kinetics under UV illumination (associated with deactivation of chemisorbed target molecules) were found, which endow nonselective MOS sensors with superior selectivity. Multilayer perceptron (MLP) indicates a 99% recognition accuracy ratio of eleven kinds of tested gases, including four kinds of benzene molecules. Our work demonstrates that transient response signals during ULM contain rich features of adsorbed gas molecules, which offers an opportunity for the facile design of advanced smart gas molecule recognition chips on both rigid and flexible platforms.
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