Development of the high sensitive MEMS accelerometer for the seismic exploration system

PreviousNext No AccessProceedings of the 9th SEGJ International Symposium, Sapporo, Japan, 12-14 October 2009Development of the high sensitive MEMS accelerometer for the seismic exploration systemAuthors: Toru SekineTakashi KunimiTakahiro TsunodaToshifumi MatsuokaTakao AizawaToru SekineAkebono Brake Industry Co.,Ltd.,Search for more papers by this author, Takashi KunimiAkebono Brake Industry Co.,Ltd.,Search for more papers by this author, Takahiro TsunodaAkebono Brake Industry Co.,Ltd.,Search for more papers by this author, Toshifumi MatsuokaKyoto Univ.,Search for more papers by this author, and Takao AizawaSuncoh Consuitants Co.,Ltd.Search for more papers by this authorhttps://doi.org/10.1190/segj092009-001.48 SectionsAboutPDF/ePub ToolsAdd to favoritesDownload CitationsTrack CitationsPermissions ShareFacebookTwitterLinked InRedditEmail Abstract We developed a new high-sensitive MEMS acceleration sensor for seismic exploration applying automotive control technology of MEMS acceleration sensor. Using the developed MEMS acceleration sensors, we build 100 pieces of the prototype sensor that detects 3-axial direction (x, y and z axes) acceleration for the seismic exploration system. The developed high-sensitive MEMS sensor is an electronic capacitance type using movable overhung silicon plate electrode that has gained achievements for automotive application. This detection system is high-sensitive and excellent in detecting temperature and DC characteristic detection. Under the theme of this study based on the technology of automotive MEMS acceleration sensor, we pursued development of achieving the required quality and performance for the reflection method seismic-exploration system aiming higher sensor sensitivity and more appropriateness of frequency characteristic, by reviewing structural analysis using Finite element method for simulation, reviewing Brownian noise and control of Squeeze film damping. The system of the trial built seismic-exploration system is configured focusing expected ultra-large scale measurements covering millions of channels foreseeable in near future, using automotive technologies. Permalink: https://doi.org/10.1190/segj092009-001.48FiguresReferencesRelatedDetailsCited ByDevelopment of MEMS Receiver for the Seismic SurveyJournal of the Japan Society of Engineering Geology, Vol. 59, No. 2 Proceedings of the 9th SEGJ International Symposium, Sapporo, Japan, 12-14 October 2009ISBN (print):978-4-938493-06-6ISSN (online):2159-6832Copyright: 2009 Pages: publication data© 2009 Published in electronic format with permission by the Society of Exploration Geophysicists of JapanPublisher:Society of Exploration Geophysicists HistoryPublished: 29 Oct 2012 CITATION INFORMATION Toru Sekine, Takashi Kunimi, Takahiro Tsunoda, Toshifumi Matsuoka, and Takao Aizawa, (2009), "Development of the high sensitive MEMS accelerometer for the seismic exploration system," SEG Global Meeting Abstracts : 1-4. https://doi.org/10.1190/segj092009-001.48 Plain-Language Summary PDF DownloadLoading ...