A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load Capacity Realizing by Decoupling the Driving and Moving Units

The stick-slip piezoelectric stage plays an important role in micro-operation and industrial applications due to its nanometer resolution. However, under high load, the output performance of the piezoelectric stage will be seriously influenced. In order to overcome this limitation, this paper proposes a piezoelectric stick-slip nanopositioning stage with ultra-high load capacity by introducing the load unit to decouple the driving and moving units. A kinetic model of prototype is established to analyze the working process. And a series of experiments are carried out to explore the output performance of the prototype. The geometry of the prototype is 85 mm ( Length ) $\times 50$ mm ( Width ) $\times 32$ mm ( Height ), and the mass of it is 303 g. By using only one piezoelectric stack, this prototype can achieve load capacity more than 10 kg and driving capacity more than 47.62 [(mm/s)g/mW] in both directions. When there is free-load, under the sawtooth waveform of 100 V at 600 Hz, the velocity of the prototype can reach 4.75 mm/s and 4.86 mm/s in forward and backward directions respectively. Meanwhile, the forward and backward resolution of the prototype can attain 30 nm and 33 nm, respectively. When the load is 10 kg which is about 33 times larger than the weight of prototype, the velocity of the prototype is almost the same as the velocity under free-load.