A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

主成分分析 故障检测与隔离 计算机科学 灵敏度(控制系统) 断层(地质) 数据预处理 数据挖掘 工程类 电子工程 人工智能 地震学 执行机构 地质学
作者
Barry M. Wise,Neal B. Gallagher,Stephanie Watts Butler,Daniel D. White,Gabriel G. Barna
出处
期刊:Journal of Chemometrics [Wiley]
卷期号:13 (3-4): 379-396 被引量:276
标识
DOI:10.1002/(sici)1099-128x(199905/08)13:3/4<379::aid-cem556>3.0.co;2-n
摘要

Journal of ChemometricsVolume 13, Issue 3-4 p. 379-396 Research Article A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process Barry M. Wise, Corresponding Author Barry M. Wise bmw@eigenvector.com Eigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USAEigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USASearch for more papers by this authorNeal B. Gallagher, Neal B. Gallagher Eigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USASearch for more papers by this authorStephanie Watts Butler, Stephanie Watts Butler Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this authorDaniel D. White Jr, Daniel D. White Jr Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this authorGabriel G. Barna, Gabriel G. Barna Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this author Barry M. Wise, Corresponding Author Barry M. Wise bmw@eigenvector.com Eigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USAEigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USASearch for more papers by this authorNeal B. Gallagher, Neal B. Gallagher Eigenvector Research, Inc., 830 Wapato Lake Road, Manson, WA 98831, USASearch for more papers by this authorStephanie Watts Butler, Stephanie Watts Butler Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this authorDaniel D. White Jr, Daniel D. White Jr Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this authorGabriel G. Barna, Gabriel G. Barna Texas Instruments, 13536 North Central Expressway, MS 944, Dallas, TX 75265, USASearch for more papers by this author First published: 14 July 1999 https://doi.org/10.1002/(SICI)1099-128X(199905/08)13:3/4<379::AID-CEM556>3.0.CO;2-NCitations: 212AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Abstract Multivariate statistical process control (MSPC) tools have been developed for monitoring a Lam 9600 TCP metal etcher at Texas Instruments. These tools are used to determine if the etch process is operating normally or if a system fault has occurred. Application of these methods is complicated because the etch process data exhibit a large amount of normal systematic variation. Variations due to faults of process concern can be relatively minor in comparison. The Lam 9600 used in this study is equipped with several sensor systems including engineering variables (e.g. pressure, gas flow rates and power), spatially resolved optical emission spectroscopy (OES) of the plasma and a radio-frequency monitoring (RFM) system to monitor the power and phase relationships of the plasma generator. A variety of analysis methods and data preprocessing techniques have been tested for their sensitivity to specific system faults. These methods have been applied to data from each of the sensor systems separately and in combination. The performance of the methods on a set of benchmark fault detection problems is presented and the strengths and weaknesses of the methods are discussed, along with the relative advantages of each of the sensor systems. Copyright © 1999 John Wiley & Sons, Ltd. Citing Literature Volume13, Issue3-4Special Issue: Proceedings of the International Chemometrics Research Meeting, May 1998, Veldhoven, The NetherlandsMay ‐ August 1999Pages 379-396 RelatedInformation
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
冲冲冲完成签到,获得积分10
刚刚
lily完成签到 ,获得积分10
2秒前
露珠完成签到,获得积分10
3秒前
旦丁洋发布了新的文献求助10
4秒前
Fairyvivi完成签到,获得积分20
5秒前
Jasper应助Cloud9采纳,获得10
5秒前
5秒前
5秒前
6秒前
7秒前
在水一方应助WPY采纳,获得10
8秒前
9秒前
充电宝应助skevvecl采纳,获得10
9秒前
菜鸟发布了新的文献求助10
10秒前
10秒前
柠檬水加冰完成签到,获得积分10
11秒前
隐形曼青应助DZ采纳,获得10
11秒前
11秒前
imxiaobing完成签到,获得积分10
12秒前
Fairyvivi发布了新的文献求助10
12秒前
quw88888发布了新的文献求助20
13秒前
狂风阿来完成签到 ,获得积分10
14秒前
14秒前
14秒前
14秒前
silent完成签到,获得积分10
14秒前
14秒前
15秒前
15秒前
笨笨支付宝关注了科研通微信公众号
15秒前
16秒前
16秒前
夏轩FromHard应助碎星采纳,获得10
16秒前
CipherSage应助美满水蜜桃采纳,获得10
16秒前
17秒前
water应助jiajia采纳,获得10
17秒前
17秒前
Yuw完成签到,获得积分10
17秒前
17秒前
向日葵发布了新的文献求助20
17秒前
高分求助中
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
Effective Learning and Mental Wellbeing 300
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3974643
求助须知:如何正确求助?哪些是违规求助? 3519094
关于积分的说明 11196979
捐赠科研通 3255182
什么是DOI,文献DOI怎么找? 1797700
邀请新用户注册赠送积分活动 877100
科研通“疑难数据库(出版商)”最低求助积分说明 806130