Sub-wavelength Resolution, Wide Field-Of-View, and Quantitative 13nm Imaging in Reflection and Transmission with a Tabletop High Harmonic Source

We demonstrate high-resolution and wide field-of-view imaging using tabletop 13nm HHG sources in transmission and reflection geometries. Additionally, we present preliminary simulations and results of complex 13nm imaging reflectometry allowing highly-sensitive, non-destructive 3D composition determination.