抛光
萃取(化学)
喷射(流体)
材料科学
机械工程
光学工程
计算机科学
机械加工
机械
光学
工程制图
复合材料
物理
冶金
工程类
化学
色谱法
作者
Zhimou Guo,Tan Jin,Qifeng Liu,Ange Lu,Meina Qu
出处
期刊:Optical Engineering
[SPIE - International Society for Optical Engineering]
日期:2018-01-06
卷期号:57 (01): 1-1
被引量:4
标识
DOI:10.1117/1.oe.57.1.015103
摘要
Rotary symmetric error (RSE) is a typical type of surface machining errors for precision components, related to the relative tool-workpiece movements adopted. A quick removal method of the workpiece surface RSE using a fluid jet polishing (FJP) process, in which the tool nozzle and workpiece move relatively as in an end-face turning process, is presented. Efficient improvement in the workpiece surface form accuracy was achieved using a relatively simple device. Two methods to extract the RSE from the measured surface error curves, i.e., the average and minimum methods, are introduced and compared. The influence of the local jet rotation radius on the removal function of FJP was investigated experimentally. The algorithm for solving the dwell time curve in two-dimensional FJP process was derived. Deterministic FJP experiments were conducted to remove the RSE by means of the end-face turning movement. Experimental results show that the proportion of the RSE to the overall surface error on most workpieces was reduced from >60% to <20%, whereas the volume of the nonrotary symmetric error (non-RSE) fluctuates slightly before and after the FJP process. Using the average RSE extraction method and combining it with the zero-phase filtering method to filter the dwell time can effectively reduce the frequency of residual circular error in the polishing surface and avoid increasing of power spectral density in the mid-high frequency after polishing.
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