压电
执行机构
PMUT公司
材料科学
微电子机械系统
压电加速度计
声学
压电马达
压电传感器
压电系数
机械工程
电子工程
电气工程
光电子学
工程类
物理
复合材料
作者
Haiyun Jin,Xiangyu Gao,Kaile Ren,Jinfeng Liu,Liao Qiao,Mingzi Liu,Wei Chen,Yan He,Shuxiang Dong,Zhuo Xu,Fēi Li
出处
期刊:IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
[Institute of Electrical and Electronics Engineers]
日期:2022-11-01
卷期号:69 (11): 3057-3069
被引量:58
标识
DOI:10.1109/tuffc.2022.3175853
摘要
The piezoelectric actuator is a kind of actuation device that acts through the inverse piezoelectric effect. Due to advantages of high precision, low power consumption, compact size, and flexible structure design, they have a wide range of applications in optics, robotics, microelectromechanical systems, and so on. Piezoelectric materials are the core materials for piezoelectric actuators. In this review, recent developments in high-performance piezoelectric materials (HPMs) are introduced, including relaxor ferroelectric crystals, textured ceramics, piezoelectric metamaterials, and so on. The advances of piezoelectric actuators are introduced in this review based on the developments of those piezoelectric materials, where the relationship between the figure of merits of materials and the performance of actuators is also discussed. Finally, we present outlooks and challenges for piezoelectric materials and actuators.
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