Effect of Discharge Properties of the Oxide High Barrier Film Deposited by Roll-to-Roll MF-PECVD

In accordance with the application of magnetically enhanced plasma discharge in high barrier film, the discharge parameters of roll-to-roll medium-frequency magnetic enhanced chemical vapor deposition (MF-PECVD) were studied. We discuss the discharge parameters, such as voltage, current, with the different vacuum pressure, and barrier property change rule by the parameters change. The results show that with the increase of discharge current, the voltage increases, and the deposition rate increases. The optimize vacuum pressure is 3 Pa, the water permeability decreases significantly with the increase of thickness, and the 300 nm films show high barrier properties, as low as 1 × 10−2 g/(m2·day). The film thickness reached 500 nm, and the water permeability value was less than 5 × 10−3 g/(m2·day), and the water permeability changed little with the increase of the thickness. And the average transmittance is 88.6%@380 nm–760 nm, film has good optical properties for display devices.