Solid-State Microbatteries

Rechargeable microbatteries are highly desired for many microsystems, which greatly promotes the miniaturization of electronic devices. In order to achieve high energy output with minimal space volume, solid-state electrolyte is a wise choice beyond conventional liquid electrolyte. Specifically, solid-state microbatteries avoid unnecessary electrochemical reactions such as gas precipitation and corrosion on the electrode surface, which is beneficial to the cell integration and environmental compatibility. In addition to the development of high-capacity active materials and solid-state electrolytes with high ionic conductivity, the revolutionary structural design of microbatteries also plays a decisive role. For example, 3D microbatteries show significant advantages over conventional plane structures. In this chapter, the classical 2D solid-state microbatteries is firstly summarized, and then the research progress of novel 3D and flexible solid-state microbatteries is discussed in details from two aspects of configuration design and manufacturing engineering. These functional solid-state microbatteries will play important roles in the growing fields of biology, medicine and microelectronics.