Laser-assisted microgrinding of ceramics

Abstract Creating three-dimensional micro scale features in hard ceramics is challenging. This paper presents the results of an experimental study of a two-step laser-assisted microgrinding process that has the potential to meet this challenge. The process works by locally weakening the ceramic material via laser irradiation and subsequently microgrinding the weakened material to create a finished micro scale feature. The paper presents the results for laser-assisted microgrinding of silicon nitride. In particular, the differences in grinding force, surface finish, tool condition, and material removal rate obtained with and without laser assist are compared and discussed. Physically based explanations for the experimental observations are given.