Back-Illuminated SPAD in 40 nm CIS Technology Achieving 56 ps Timing Jitter With 15 V Breakdown Voltage for Short/Mid-Range LiDAR Applications

We report on a back-illuminated single-photon avalanche diode (SPAD) based on stacked 40 nm CIS technology for short/mid-range LiDAR applications. The SPAD is optimized to achieve superior temporal resolution with a low breakdown voltage of 15 V. It achieves a photon detection probability of 21% and timing jitter of 56 ps at 940 nm with the excess bias voltage of 5 V.