Novel Tri-Axial MEMS Capacitor Vector Hydrophone

A capactitor vector hydrophone based on MEMS technology is introduced.The detection unit of vector hydrophone consists of a sandwich sensitive chip and a signal conditioning circuit transmitting integrated technique.By optimizing the structure of sensitive chip and low-noise signal conditioning circuit,vector hydrophone achieves a high sensitivity and resolution.The cross orthogonal detection unit of vector hydrophone is statically simulated by Fabricated and encapsulated by MEMS technology,and tested by underwater standing wave field.The test results show that the pressure sensitivity of vector hydrophone reached-180 dB(0 dB=IV/μPa,1 000 Hz),and dynamic range is more than 120 dB.