DESIGN AND CHARACTERIZATION OF VARIOUS SHAPES OF MICROCANTILEVER FOR HUMAN IMMUNODEFICIENCY VIRUS DETECTION

The ability to detect pathogenic relevant molecules in the human body with high sensitivity and specificity has a powerful opportunity in early diagnosis and treatment of diseases. This paper presents the design, analysis and simulation of MEMS microcantilevers with various shapes like rectangular, triangular, V-shape and T-shape (Paddle) for one HIV detection with mass 10 -18 Kg which produces force of 9.81x 10 -18 Newton, To analyze the sensitivity of microcantilever , SiO2 material is used. The simulation of these designs is performed by Comsol Multiphysics. The change in total displacement of a microcantilever with respect to change in its shape for the same applied force is observed. From the analysis performed T-shape (Paddle) cantilever with length 1000µm, width 100 µm, thickness 0.5 µm with paddle length 500 µm, width 100 µm and thickness 0.5 µm produces maximum displacement of 3.24 x10 -07 µm. By this obtained deflection, using recent advanced read out systems the disease can be