Ultrasonic tool shank with multiple vibration mode for micro-nano drilling: Design, optimization and experiment

声学 振动 超声波传感器 传感器 有限元法 超声波加工 法国号角 机械加工 工程类 结构工程 材料科学 机械工程 物理
作者
Heng Zhao,Zhili Long,Shuyuan Ye,Jianzhong Ju,Yuxiang Li
出处
期刊:Sensors and Actuators A-physical [Elsevier BV]
卷期号:366: 114987-114987 被引量:4
标识
DOI:10.1016/j.sna.2023.114987
摘要

The machining effects of hole drilling is limited by merely changing the amplitude. Adjusting ultrasonic vibration frequency to expand the matching range of machining parameters optimization is necessary to improve hole drilling effects. Therefore, the design, optimization, and experiment evaluation for a novel integrated, fined, low-cost dual-frequency ultrasonic tool shank is proposed, which can work in three vibration modes for micro-nano precision drilling. The principle of the dual-frequency ultrasonic transducer is introduced. The electro-mechanical equivalent circuit model with step horn is applied to study the dual-frequency characteristics. The transducer displacement equation model based on the wave equation theory is deduced to find the shared vibration node of the first and third frequency. Sensitivity analysis by equivalent circuit model and Finite element method (FEM) simulation of the key parameter is both conducted to optimize ultrasonic transducer geometry dimension. The vibration node of mounting flange is specified in an identical position for the dual vibration modes. A prototype of ultrasonic tool shank is fabricated and evaluated in experiments. It demonstrates that the dual working frequency of the ultrasonic transducer is 34.9 kHz and 104.5 kHz in the first and third mode resonant vibration, which is benefit to the low and high frequency drilling. Three working modes of the low, high, and coupling frequency vibration is measured by a self-developed ultrasonic generator. When 40 V voltage is excited, the vibration amplitudes of the low and high frequency are 17.8 µm, and 9.3 µm, respectively, which can meet with the drilling requirement. Moreover, the coupling vibration with the low and high mode are excited simultaneously, and the motion trajectory of the coupling vibration is observed in a "M" shape, which is a novel trajectory for the precision micro-nano drilling. Micro drilling experiments show that the 35 kHz ultrasonic vibration drilling can achieve better machining effect than conventional drilling (CD). The 105 kHz ultrasonic drilling outperforms the CD, 35 kHz and coupling ultrasonic drilling at cutting force reduction. The coupling ultrasonic vibration drilling achieves the lowest chipping diameter. It is to be noted that the 105 kHz-8 µm produce the fined smoothly surface. The 35 kHz, 105 kHz and coupling ultrasonic drilling can produce better surface micro morphology with less quantity and size of craters than that of CD.
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