Preparation of La-Modified Lead Titanate Film Capacitors and Influence of SrRuO3 Electrodes on the Electrical Properties

SrRuO 3 electrodes are expected to dramatically improve the electrical properties of PbTiO 3 based ferroelectric film capacitors. Because of the good ferroelectricity and pyroelectricity of La-modified lead titanate (PLT), PLT film capacitors with SrRuO 3 and Pt electrodes were prepared. The PLT and SrRuO 3 films were prepared by YAG(YAG) laser ablation. YAG laser ablation has advantages over the conventional excimer laser ablation in running cost and safety. The dependence of ablation conditions on the composition and structure of PLT films obtained by the YAG laser ablation was revealed. The electrical properties of the capacitor with SrRuO 3 were compared with Pt. As a result, the low leakage current was successfully obtained from the capacitors with SrRuO 3 electrodes. Furthermore, little polarization fatigue occurred in a SrRuO 3 /PLT/SrRuO 3 capacitor after 10 10 switching cycles. The electrical properties of the capacitors with Pt and SrRuO 3 top electrodes are discussed. The dielectric property, D - E hysteresis curves and C - V characteristics were not affected by the top electrode material. However, it was found that the leakage current was significantly influenced by it. The results can be explained on the basis of the Schottky barrier that formed at the interface between the top electrode and the PLT layer. Based on these results, the conduction mechanism in PLT thin-film capacitors was investigated.