陀螺仪
灵敏度(控制系统)
多物理
谐振器
噪音(视频)
传感器
声学
布朗噪声
有限元法
物理
计算机科学
电子工程
工程类
光学
白噪声
电信
人工智能
图像(数学)
热力学
量子力学
作者
Xin Zhou,Dingbang Xiao,Zhanqiang Hou,Qingsong Li,Yulie Wu,Xuezhong Wu
出处
期刊:Journal of microelectromechanical systems
[Institute of Electrical and Electronics Engineers]
日期:2017-06-01
卷期号:26 (3): 519-527
被引量:34
标识
DOI:10.1109/jmems.2017.2679726
摘要
This paper presents a comprehensive investigation of the influences of the structure parameters on the sensitivity and Brownian noise of the disk resonator gyroscope (DRG). The mechanical sensitivity, transducer sensitivity, Brownian displacement, and Brownian noise floor of the DRG with varying structural parameters (including ring number, resonator diameter, structure height, and anchor size) are calculated based on the finite-element method (COMSOL Multiphysics). Each parameter is studied independently. Meanwhile, useful comparison between the DRG and the ring vibratory gyroscope is made, which indicates that the DRG has great advantages over the transducer sensitivity and Brownian noise. Last but not least, a multi-objective optimization method is used to design the ring thickness distribution of the DRG and an instructive ring thickness distribution designing rule is obtained. The preceding study can give an explicit guideline for designing all kinds of DRG and may also provide useful information for designing other micro gyroscopes. The multi-objective optimization method could be expanded to include other objectives, constraints, or variables relevant to all kinds of gyroscopes or other microelectromechanical systems devices. [2016-0136]
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