Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control

In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approach is able to compensate the errors for a given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method that results from such an approach.