Oxidation-driven 2D LIPSS on amorphous Si films atop metal layers: The interplay of near-field and far-field effects

We investigate the formation of Laser-Induced Periodic Surface Structures (LIPSS) on amorphous Si films coated on Al using circularly polarized femtosecond lasers. By controlling laser fluence, we induce oxidation-based surface patterns, with their regularity governed by the interplay between near-field and far-field contributions. Achieving the right balance between these effects results in a consistent hexagonal pattern. Varying the underlying metal type further revealed its impact on pattern quality: strong far-field contributions led to irregular patterns, while dominant near-field effects resulted in extensive oxidation. Our study reveals the critical balance between near-field and far-field effects in optimizing 2D LIPSS patterns, emphasizing the role of the underlying metal.